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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 16 — Jun. 1, 1999
  • pp: 3621–3625

Serial bideposition of anisotropic thin films with enhanced linear birefringence

Ian Hodgkinson and Qi hong Wu  »View Author Affiliations


Applied Optics, Vol. 38, Issue 16, pp. 3621-3625 (1999)
http://dx.doi.org/10.1364/AO.38.003621


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Abstract

We describe a serial bideposition technique in which a tilted substrate is rotated stepwise by half a turn about a normal axis during the evaporation of a metal oxide from a single electron-beam source. Coatings formed by the new method develop a columnar nanostructure that is perpendicular to the substrate and has greatest width or bunching perpendicular to the common deposition plane. With appropriate choice of deposition parameters, the method produces biaxial films with large birefringence, principal axes aligned parallel and perpendicular to the substrate, and improved uniformity. Measured phase retardances for light incident normally on the films are double the corresponding values for tilted-columnar films.

© 1999 Optical Society of America

OCIS Codes
(260.1440) Physical optics : Birefringence
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization

History
Original Manuscript: December 21, 1998
Revised Manuscript: February 23, 1999
Published: June 1, 1999

Citation
Ian Hodgkinson and Qi hong Wu, "Serial bideposition of anisotropic thin films with enhanced linear birefringence," Appl. Opt. 38, 3621-3625 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-16-3621


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References

  1. I. J. Hodgkinson, F. Horowitz, H. A. Macleod, M. Sikkens, J. J. Wharton, “Measurement of the principal refractive indices of thin films deposited at oblique incidence,” J. Opt. Soc. Am. A 2, 1693–1697 (1985). [CrossRef]
  2. F. Horowitz, H. A. Macleod, “Determination of principal refractive indices of birefringent films,” in Optical Interference Coatings, Vol. 6 of 1988 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1988), pp. 203–206.
  3. T. Motohiro, Y. Taga, “Thin film retardation plate by oblique deposition,” Appl. Opt. 28, 2466–2482 (1989). [CrossRef] [PubMed]
  4. E. Pelletier, F. Flory, Y. Hu, “Optical characterization of thin films by guided waves,” Appl. Opt. 28, 2918–2924 (1989). [CrossRef] [PubMed]
  5. F. Flory, D. Endelema, E. Pelletier, I. J. Hodgkinson, “Anisotropy in thin films: modeling and measurement of guided and nonguided optical properties: application to TiO2 films,” Appl. Opt. 32, 5649–5659 (1993). [CrossRef] [PubMed]
  6. F. Horowitz, S. B. Mendes, “Envelope and waveguide methods: a comparative study of PbF2 and CeO2 birefringent films,” Appl. Opt. 33, 2659–2663 (1994). [CrossRef] [PubMed]
  7. Q. H. Wu, I. J. Hodgkinson, “Materials for birefringent coatings,” Opt. Photon. News 5(5), S9–S10 (1994).
  8. H. Wang, “Determination of optical constants of absorbing crystalline thin films from reflectance and transmittance measurements with oblique incidence,” J. Opt. Soc. Am. A 11, 2331–2337 (1994). [CrossRef]
  9. A. Zuber, H. Jänchen, N. Kaiser, “Perpendicular-incidence photometric ellipsometry of biaxial anisotropic thin films,” Appl. Opt. 35, 5553–5556 (1996). [CrossRef] [PubMed]
  10. H. Jänchen, D. Endelema, N. Kaiser, F. Flory, “Determination of the refractive indices of highly biaxial anisotropic coatings using guided modes,” Pure Appl. Opt. 5, 405–415 (1996). [CrossRef]
  11. I. J. Hodgkinson, Q. H. Wu, J. C. Hazel, “Empirical equations for the principal refractive indices and column angle of obliquely-deposited films of tantalum oxide, titanium oxide and zirconium oxide,” Appl. Opt. 37, 2653–2659 (1998). [CrossRef]
  12. A. Lakhtakia, R. Messier, “Reflection at the Motohiro-Taga interface of two anisotropic materials with columnar microstructures,” Opt. Eng. 33, 2529–2534 (1994). [CrossRef]
  13. M. Suzuki, Y. Taga, “Anisotropy in the optical absorption of Ag-SiO2 thin films with oblique columnar structures,” J. Appl. Phys. 71, 2848–2854 (1992). [CrossRef]
  14. T. Motohiro, Y. Takeda, T. Hioki, S. Noda, “Simultaneous oblique deposition from opposite azimuthal directions for fabrication of thin film retardation plates,” in International Symposium on Polarization Analysis and Applications to Device Technology, T. Yoshizawa, H. Yokota, eds., Proc. SPIE2873, 214–217 (1996). [CrossRef]
  15. I. J. Hodgkinson, Q. H. Wu, M. J. Brett, K. Robbie, “Vacuum deposition of biaxial films with surface-aligned principal axes and large birefringence Δn,” in Optical Interference Coatings, Vol. 9 of 1998 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1998), pp. 104–106.
  16. I. J. Hodgkinson, Q. H. Wu, Birefringent Thin Films and Polarizing Elements (World Scientific, Singapore, 1997). [CrossRef]
  17. H. K. Pulker, “Characterization of optical thin films,” Appl. Opt. 18, 1969–1977 (1979). [CrossRef] [PubMed]

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