Separation of Measurement of the Refractive Index and the Geometrical Thickness by Use Of A Wavelength-Scanning Interferometer with A Confocal Microscope
Applied Optics, Vol. 38, Issue 19, pp. 4065-4073 (1999)
http://dx.doi.org/10.1364/AO.38.004065
Acrobat PDF (1159 KB)
Abstract
An improved system for the separate measurement of the refractive index and the geometrical thickness that constitutes a hybrid configuration of a confocal microscope and a wavelength-scanning heterodyne interferometer with a laser diode is presented. The optical path difference can be measured in less than 1 s, which is 10 times quicker than with the low-coherence interferometry previously used, and with a resolution of 10 μm with a fixed reference mirror. Separate measurement of the refractive index and the geometrical thickness of glass plates was demonstrated by use of the arrangement in place of the low-coherence interferometer used previously.
© 1999 Optical Society of America
[Optical Society of America ]
OCIS Codes
(040.2840) Detectors : Heterodyne
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(170.6960) Medical optics and biotechnology : Tomography
(180.1790) Microscopy : Confocal microscopy
Citation
Takashi Fukano and Ichirou Yamaguchi, "Separation of Measurement of the Refractive Index and the Geometrical Thickness by Use Of A Wavelength-Scanning Interferometer with A Confocal Microscope," Appl. Opt. 38, 4065-4073 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-19-4065
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