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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 19 — Jul. 1, 1999
  • pp: 4089–4094

Heterodyne Interferometer with Subatomic Periodic Nonlinearity

Chien-ming Wu, John Lawall, and Richard D. Deslattes  »View Author Affiliations


Applied Optics, Vol. 38, Issue 19, pp. 4089-4094 (1999)
http://dx.doi.org/10.1364/AO.38.004089


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Abstract

A new, to our knowledge, heterodyne interferometer for differential displacement measurements is presented. It is, in principle, free of periodic nonlinearity. A pair of spatially separated light beams with different frequencies is produced by two acousto-optic modulators, avoiding the main source of periodic nonlinearity in traditional heterodyne interferometers that are based on a Zeeman split laser. In addition, laser beams of the same frequency are used in the measurement and the reference arms, giving the interferometer theoretically perfect immunity from common-mode displacement. We experimentally demonstrated a residual level of periodic nonlinearity of less than 20 pm in amplitude. The remaining periodic error is attributed to unbalanced ghost reflections that drift slowly with time.

© 1999 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

Citation
Chien-ming Wu, John Lawall, and Richard D. Deslattes, "Heterodyne Interferometer with Subatomic Periodic Nonlinearity," Appl. Opt. 38, 4089-4094 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-19-4089


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References

  1. N. Bobroff, “Recent advances in displacement measuring interferometry,” Meas. Sci. Technol. 4, 907–926 (1993).
  2. C. M. Wu and R. D. Deslattes, “Analytical modeling of the periodic nonlinearity in heterodyne interferometry,” Appl. Opt. 37, 6696–6700 (1998).
  3. C. M. Wu and C. S. Su, “Nonlinearity in measurements of length by optical interferometry,” Meas. Sci. Technol. 7, 62–68 (1996).
  4. W. Hou and G. Wilkening, “Investigation and compensation of the nonlinearity of heterodyne interferometers,” Precis. Eng. 14, 91–98 (1992).
  5. C. M. Wu, C. S. Su, and G. S. Peng, “Correction of nonlinearity in one-frequency optical interferometry,” Meas. Sci. Technol. 7, 520–524 (1996).
  6. M. Tanaka, T. Yamagami, and K. Nakayama, “Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels,” IEEE Trans. Instrum. Meas. 38, 552–554 (1989).
  7. This relation has also been discussed in A. E. Rosenbluth and N. Bobroff, “Optical sources of nonlinearity in heterodyne interferometers,” Precis. Eng. 12, 7–11 (1990).

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