Thin-film microlens arrays with high fill factors have been fabricated in a one-step process by shading a vapor beam in a vacuum-deposition apparatus with metallic meshes placed at defined distances to the substrate surface. To generate three-dimensional mask structures with the necessary depth profiles, microgalvanic technology has been applied. Profiles and optical properties of the microlenses have been studied theoretically and experimentally.
© 1999 Optical Society of America
(230.4000) Optical devices : Microstructure fabrication
(240.0310) Optics at surfaces : Thin films
(310.1860) Thin films : Deposition and fabrication
(350.3950) Other areas of optics : Micro-optics
Rüediger Grunwald, Helge Mischke, and Wolfgang Rehak, "Microlens Formation by Thin-Film Deposition with Mesh-Shaped Masks," Appl. Opt. 38, 4117-4124 (1999)