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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 19 — Jul. 1, 1999
  • pp: 4164–4171

Shadow-angle method for anisotropic and weakly absorbing films

Gregory Surdutovich, Ritta Vitlina, and Vitor Baranauskas  »View Author Affiliations


Applied Optics, Vol. 38, Issue 19, pp. 4164-4171 (1999)
http://dx.doi.org/10.1364/AO.38.004164


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Abstract

A method for determining the optical properties of a film on an isotropic substrate is proposed. The method is based on the existence of two specific incidence angles in the angular interference pattern of the p-polarized light where oscillations of the reflection coefficient cease. The first of these angles, θ B1, is the well-known Abelès angle, i.e., the ambient–film Brewster angle, and the second angle θ B2 is the film–substrate Brewster angle. In the conventional planar geometry and in a vacuum ambient there is a rigorous constraint ε1 + ε > ε1ε on the film and the substrate dielectric permittivities ε1 and ε, respectively, for the existence of the second angle θ B2. The limitation may be removed in an experiment by use of a cylindrical lens as an ambient with ε0 > 1, so that both angles become observable. This, contrary to general belief, allows one to adopt the conventional Abelès method not only for films with ε1 close to the substrate’s value ε but also for any value of ε1. The method, when applied to a wedge-shaped film or to any film of unknown variable thickness, permits one to determine (i) the refractive index of a film on an unknown substrate, (ii) the vertical and the horizontal optical anisotropies of a film on an isotropic substrate, (iii) the weak absorption of a moderately thick film on a transparent or an absorbing isotropic substrate.

© 1999 Optical Society of America

OCIS Codes
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
(120.5700) Instrumentation, measurement, and metrology : Reflection
(260.5430) Physical optics : Polarization

History
Original Manuscript: December 4, 1998
Revised Manuscript: March 23, 1999
Published: July 1, 1999

Citation
Gregory Surdutovich, Ritta Vitlina, and Vitor Baranauskas, "Shadow-angle method for anisotropic and weakly absorbing films," Appl. Opt. 38, 4164-4171 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-19-4164


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References

  1. F. Abelès, “Methods for determining optical parameters of thin films,” in Progress in Optics, E. Wolf, ed. (North-Holland, Amsterdam, 1968), Vol. 2, pp. 251–289.
  2. R. Swanepoel, “Determination of surface roughness and optical constants of inhomogeneous amorphous silicon films,” J. Phys. E 17, 896–903 (1984). [CrossRef]
  3. T. Pisarkiewicz, “Reflection spectrum for a thin film with non-uniform thickness,” J. Phys. D 27, 160–164 (1994). [CrossRef]
  4. R. M. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1977).
  5. M. Hacskaylo, “Determination of the refractive index of thin dielectric films,” J. Opt. Soc. Am. 54, 198–203 (1964). [CrossRef]
  6. J. M. Bennett, H. E. Bennett, “Polarization,” in Handbook of Optics, W. G. Driscoll, W. Vaughan, eds. (McGraw-Hill, New York, 1978), pp. 10–17.
  7. O. S. Heavens, Optical Properties of Thin Solid Films (Dover, New York, 1991).
  8. I. Hodgkinson, Q. H. Wu, C. Rawle, “Common-index thin film polarizers for light at normal incidence,” in Optical Interference Coatings, Vol. 9 of 1998 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1998), pp. 173–175.
  9. I. Hodgkinson, J. Hazel, Q. H. Wu, “In situ measurement of principal refractive indices of thin films by two-angle ellipsometry,” Thin Solid Films 313–314, 368–372 (1998). [CrossRef]
  10. I. Hodgkinson, Q. H. Wu, J. Hazel, “Empirical equations for the principal refractive indices and column angle of obliquely deposited films of tantalum oxide, titanium oxide, and zirconium oxide,” Appl. Opt. 37, 2653–2659 (1998); I. Hodgkinson, Q. Wu, Birefringent Thin Films and Polarizing Elements (World Scientific, Singapore, 1997), Chap. 8, pp. 147–149. [CrossRef]
  11. G. I. Surdutovich, J. Kolenda, J. F. Fragalli, L. Misoguti, R. Z. Vitlina, V. Baranauskas, “An interference method for the determination of thin film anisotropy,” Thin Solid Films 279, 119–123 (1996). [CrossRef]
  12. G. I. Surdutovich, R. Z. Vitlina, A. V. Ghiner, S. F. Durrant, V. Baranauskas, “Three polarization reflectometry methods for determination of optical anisotropy,” Appl. Opt. 37, 65–78 (1998). [CrossRef]
  13. O. S. Heavens, H. M. Liddell, “Influence of absorption on measurement of refractive index of films,” Appl. Opt. 4, 629–630 (1965). [CrossRef]
  14. H. A. Macleod, “Monitoring of optical coatings,” Appl. Opt. 20, 82–89 (1981). [CrossRef] [PubMed]
  15. Rusli, G. A. J. Amaratunga, “Determination of the optical constants and thickness of thin films on slightly absorbing substrates,” Appl. Opt. 34, 7914–7924 (1995).
  16. K. Lamprecht, W. Papousek, G. Leising, “Problem of ambiguity in the determination of optical constants of thin absorbing films from spectroscopic reflectance and transmittance measurements,” Appl. Opt. 36, 6364–6371 (1997). [CrossRef]
  17. C. K. Carniglia, “Ellipsometric calculations for nonabsorbing thin films with linear refractive-index gradients,” J. Opt. Soc. Am. A 7, 848–856 (1990). [CrossRef]
  18. G. Parjadis de Lariviere, J. M. Frigerio, J. Rivory, F. Abelès, “Estimate of the degree of inhomogeneity of the refractive index of dielectric films from spectroscopic ellipsometry,” Appl. Opt. 31, 6056–6061 (1992). [CrossRef]

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