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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 19 — Jul. 1, 1999
  • pp: 4177–4181

Determination of the Refractive Indices of Layers in a Multilayer Stack by a Guided-Wave Technique

Josep Massaneda, Francois Flory, and Emile Pelletier  »View Author Affiliations


Applied Optics, Vol. 38, Issue 19, pp. 4177-4181 (1999)
http://dx.doi.org/10.1364/AO.38.004177


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Abstract

The m-lines technique is used to measure the refractive indices and thicknesses of layers embedded in a multilayer stack. The multilayer considered is deposited by ion plating. Its formula is silica–HLHLH–air, where H and L denote Ta2O5 and SiO2λ/4 layers, respectively, with λ = 514.5 nm. Measurements indicate that the refractive index of Ta2O5 is 5 × 10−3 greater when the layer is close to air than when the layer is inside the coating and that the Ta2O5 is slightly more birefringent.

© 1999 Optical Society of America

OCIS Codes
(230.7390) Optical devices : Waveguides, planar
(260.1440) Physical optics : Birefringence
(290.3030) Scattering : Index measurements
(310.0310) Thin films : Thin films
(310.2790) Thin films : Guided waves
(310.6860) Thin films : Thin films, optical properties

Citation
Josep Massaneda, Francois Flory, and Emile Pelletier, "Determination of the Refractive Indices of Layers in a Multilayer Stack by a Guided-Wave Technique," Appl. Opt. 38, 4177-4181 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-19-4177


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References

  1. F. Flory, “Guided waves techniques for the characterization of optical coatings,” in Thin Films for Optical Systems, F. Flory, ed., Vol. 49 of Optical Engineering Series (Marcel Dekker, New York, 1995), pp. 393–454.
  2. J. Massaneda, “Utilisation des techniques d’optique guidée pour les mesures d’indice et d’épaisseur de couches minces uniques ou prises dans un empilement,” Thèse de Docteur en Sciences (Université d’Aix-Marseille III, Marseille, France, 1997).
  3. P. K. Tien and R. Ulrich, “Theory of prism-film coupler and thin-film light guides,” J. Opt. Soc. Am 60, 1325–1337 (1970).
  4. F. Flory, D. Endelema, E. Pelletier, and I. Hodgkinson, “Anisotropy in thin films: modeling and measurement of guided and nonguided optical properties: application to TiO2 films,” Appl. Opt. 32, 5649–5659 (1993).
  5. R. Petit and M. Cadilhac, “Theorie électromagnétique du coupleur à prisme,” J. Opt. 8, 41–49 (1977).
  6. P. K. Tien, R. Ulrich, and R. J. Martin, “Modes of propagating light waves in thin deposited semiconductor films,” Appl. Phys. Lett. 14, 291–294 (1969).
  7. P. Huguet-Chanteaume, S. Monneret, and F. Flory, “Comment faire des mesures d’indice de réfraction de haute précision avec le coupleur à prism,” presented at the Dix-Septièmes Journées Nationales d’Optique Guidée, St Etienne, France, 1997.

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