We propose a genetic local search algorithm (GLSA) for the optimization design of diffractive optical elements (DOE’s). This hybrid algorithm incorporates advantages of both genetic algorithm (GA) and local search techniques. It appears better able to locate the global minimum compared with a canonical GA. Sample cases investigated here include the optimization design of binary-phase Dammann gratings, continuous surface-relief grating array generators, and a uniform top-hat focal plane intensity profile generator. Two GLSA’s whose incorporated local search techniques are the hill-climbing method and the simulated annealing algorithm are investigated. Numerical experimental results demonstrate that the proposed algorithm is highly efficient and robust. DOE’s that have high diffraction efficiency and excellent uniformity can be achieved by use of the algorithm we propose.

© 1999 Optical Society of America

[Optical Society of America ]

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