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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 22 — Aug. 1, 1999
  • pp: 4831–4836

Use of thin films for high-sensitivity angle measurement

Peisen S. Huang  »View Author Affiliations


Applied Optics, Vol. 38, Issue 22, pp. 4831-4836 (1999)
http://dx.doi.org/10.1364/AO.38.004831


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Abstract

We propose to use thin films to provide a drastic improvement of measurement sensitivity in the recently developed small-angle measurement method, namely, angle measurement based on the internal-reflection effect. By designing the thin films (single layer or multiple layers) so that they provide an antireflection effect in the vicinity of the critical angle, we show that the sensitivity of angle measurement can be increased exponentially with the increase of the number of thin-film layers. This method provides a new means of designing angle sensors with increased sensitivities without having to increase the number of reflections and therefore the physical size and the required fabrication accuracy of the reflection prisms. We describe the design of the thin films for this particular application and the analysis of measurement sensitivity and range as determined by the material and the number of layers of the thin films. Selection of the optimal initial angle for high linearity performance is also discussed.

© 1999 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5700) Instrumentation, measurement, and metrology : Reflection
(240.0310) Optics at surfaces : Thin films
(260.6970) Physical optics : Total internal reflection

History
Original Manuscript: February 4, 1999
Revised Manuscript: March 26, 1999
Published: August 1, 1999

Citation
Peisen S. Huang, "Use of thin films for high-sensitivity angle measurement," Appl. Opt. 38, 4831-4836 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-22-4831


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References

  1. J. Rohlin, “An interferometer for precision angle measurement,” Appl. Opt. 2, 762–763 (1963). [CrossRef]
  2. D. Malacara, O. Harris, “Interferometric measurement of angles,” Appl. Opt. 9, 1630–1633 (1970). [CrossRef] [PubMed]
  3. G. D. Chapman, “Interferometric angular measurement,” Appl. Opt. 13, 1646–1651 (1974). [CrossRef] [PubMed]
  4. R. C. Quenelle, L. J. Wuerz, “A new microcomputer-controlled laser dimensional measurement and analysis system,” Hewlett-Packard J. 34, 3–13 (1983).
  5. P. Shi, E. Stijns, “New optical methods for measuring small-angle rotations,” Appl. Opt. 27, 4342–4344 (1988). [CrossRef] [PubMed]
  6. T. Takano, S. Yonehara, “Basic investigations on an angle measurement system using a laser,” IEEE Trans. Aerosp. Electron. Syst. 26, 657–662 (1990). [CrossRef]
  7. P. Shi, E. Stijns, “Improving the linearity of the Michelson interferometric angular measurement by a parameter compensation method,” Appl. Opt. 32, 44–51 (1993). [CrossRef] [PubMed]
  8. P. R. Yoder, E. R. Schlesinger, J. L. Chickvary, “Active annular-beam laser autocollimator system,” Appl. Opt. 14, 1890–1895 (1975). [CrossRef] [PubMed]
  9. L. D. Hutcheson, “Practical electro-optic deflection measurements system,” Opt. Eng. 15, 61–63 (1976). [CrossRef]
  10. A. E. Ennos, M. S. Virdee, “High accuracy profile measurement of quasi-conical mirror surface by laser autocollimation,” Prec. Eng. 4, 5–8 (1982). [CrossRef]
  11. F. J. Schuda, “High-precision, wide-range, dual-axis, angle monitoring system,” Rev. Sci. Instrum. 54, 1648–1652 (1983). [CrossRef]
  12. G. G. Luther, R. D. Deslattes, “Single axis photoelectronic autocollimator,” Rev. Sci. Instrum. 55, 747–750 (1984). [CrossRef]
  13. W. Duis, J. Trede, G.-J. Ulbrich, M. Mross, “Design and performance of a high resolution, high accuracy automatic autocollimator,” in Precision Engineering and Optomechanics, D. Vukobratovich, ed., Proc. SPIE1167, 297–304 (1989). [CrossRef]
  14. P. S. Huang, S. Kiyono, O. Kamada, “Angle measurement based on the internal-reflection effect: a new method,” Appl. Opt. 31, 6047–6055 (1992). [CrossRef] [PubMed]
  15. P. S. Huang, J. Ni, “Angle measurement based on the internal-reflection effect and the use of right-angle prisms,” Appl. Opt. 34, 4976–4981 (1995). [CrossRef] [PubMed]
  16. P. S. Huang, J. Ni, “Angle measurement based on the internal-reflection effect using elongated critical-angle prisms,” Appl. Opt. 35, 2239–2241 (1996). [CrossRef] [PubMed]
  17. P. S. Huang, Y. Li, “Small-angle measurement by use of a single prism,” Appl. Opt. 37, 6636–6642 (1998). [CrossRef]
  18. P. S. Huang, J. Ni, “Angle measurement based on the internal-reflection effect and its application in measurement of geometric errors of machine tools,” in Proceedings of the Eighth Annual Meeting of the American Society for Precision Engineering (American Society of Precision Engineering, Raleigh, N.C., 1993), pp. 350–353.
  19. S. Kiyono, X. Shan, H. Sato, “Development of an AFM using a critical angular sensor,” Int. J. Jpn. Soc. Prec. Eng. 27, 373–378 (1993).
  20. P. S. Huang, X. Xu, “Optical probe for surface profiling of aspherical mirrors,” in Proceedings of the Tenth Annual Meeting of the American Society for Precision Engineering (American Society of Precision Engineering, Raleigh, N.C., 1995), pp. 112–115.
  21. P. S. Huang, Y. Li, “Laser measurement instrument for fast calibration of machine tools,” in Proceedings of the Eleventh Annual Meeting of the American Society for Precision Engineering (American Society of Precision Engineering, Raleigh, N.C., 1996), pp. 644–647.
  22. S. Zhang, S. Kiyono, Y. Uda, M. Mito, “Development of a measurement system of the angular profile of the polygon mirror surface,” Int. J. Jpn. Soc. Prec. Eng. 30, 349–350 (1996).
  23. M.-H. Chiu, D.-C. Su, “Angle measurement using total-internal-reflection heterodyne interferometry,” Opt. Eng. 36, 1750–1753 (1997). [CrossRef]
  24. M.-H. Chiu, D.-C. Su, “Improved technique for measuring small angles,” Appl. Opt. 36, 7104–7106 (1997). [CrossRef]
  25. W. Zhou, L. Cai, “Interferometer for small-angle measurement based on total internal reflection,” Appl. Opt. 37, 5957–5963 (1998). [CrossRef]
  26. W. Zhou, L. Cai, “An angular displacement interferometer based on total internal reflection,” Meas. Sci. Technol. 9, 1647–1652 (1998). [CrossRef]
  27. S. Zhang, S. Kiyono, Y. Uda, “Nanoradian angle sensor and in situ self-calibration,” Appl. Opt. 37, 4154–4159 (1998). [CrossRef]
  28. K. Kato, T. Musha, K. Ito, “Method and apparatus for detecting focussing error signal of objective lens,” U.S. Patent No.4,505,584, (19March1985).
  29. O. S. Heavens, Optical Properties of Thin Solid Films (Dover, New York, 1991), Chap. 4, p. 46.

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