The phase-space measurement of micro-optical objects with submillimeter dimensions is reported for the first time to our knowledge. The experimental data were compared with simulated results from interferometric measurements and were found to be in good agreement.
© 1999 Optical Society of America
Daniela Dragoman, Mircea Dragoman, Jochen Bähr, and Karl-Heinz Brenner, "Phase-Space Measurements of Micro-Optical Objects," Appl. Opt. 38, 5019-5023 (1999)