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Applied Optics

Applied Optics


  • Vol. 38, Iss. 25 — Sep. 1, 1999
  • pp: 5388–5398

Error analysis of null ellipsometry with depolarization

Soe-Mie F. Nee  »View Author Affiliations

Applied Optics, Vol. 38, Issue 25, pp. 5388-5398 (1999)

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Null ellipsometry is analyzed for components with depolarizations for unpolarized incident light. Serious imperfections include sample depolarization D < 0.2, misalignment (δC < 2°) and off-quarter-wave retardance (δτ < 5°) of the compensator. The four-zone null positions are derived analytically to the second order of serious imperfections and are also simulated based on Mueller matrices with depolarization. Errors of all four-zone nulls increase with increasing D. Depolarizations of all components except the analyzer cause errors to the nulls. The errors associated with D always couple with the second order of δC and δτ and are enhanced by csc2 2ψ. These divergent errors limit the applicable region of null ellipsometry where the errors in ψ and Δ are within 0.1°, and the simulation agrees well with the analytic solutions.

© 1999 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(240.0240) Optics at surfaces : Optics at surfaces
(260.5430) Physical optics : Polarization

Original Manuscript: March 29, 1999
Revised Manuscript: June 14, 1999
Published: September 1, 1999

Soe-Mie F. Nee, "Error analysis of null ellipsometry with depolarization," Appl. Opt. 38, 5388-5398 (1999)

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