OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 25 — Sep. 1, 1999
  • pp: 5447–5451

Variation of band-edge position with errors in the monitoring of layer termination level for long- and short-wave pass filters

Ronald R. Willey and David E. Machado  »View Author Affiliations


Applied Optics, Vol. 38, Issue 25, pp. 5447-5451 (1999)
http://dx.doi.org/10.1364/AO.38.005447


View Full Text Article

Enhanced HTML    Acrobat PDF (115 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Optical monitoring of periodic thin-film stacks by the termination of each layer at the same constant photometric level has certain advantages. One of these principal advantages is the error compensation effect in the vicinity of the monitoring wavelength. In this study, we examine, by simulation, the effect of an error in the knowledge of the absolute value of the photometric termination level on the probable stability in the manufacture of the edge position of a blocked band. The results include equations that allow the determination of the appropriate values of parameters associated with the optimum termination levels to minimize the effects of such errors.

© 1999 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication

History
Original Manuscript: February 26, 1999
Revised Manuscript: May 17, 1999
Published: September 1, 1999

Citation
Ronald R. Willey and David E. Machado, "Variation of band-edge position with errors in the monitoring of layer termination level for long- and short-wave pass filters," Appl. Opt. 38, 5447-5451 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-25-5447

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited