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Applied Optics

Applied Optics


  • Vol. 38, Iss. 25 — Sep. 1, 1999
  • pp: 5452–5457

Ion-assisted codeposition of CaF2-rich CaF2–TiO2 composites as infrared-transmitting films

Rung-Ywan Tsai, Sen-Chrong Shiau, Doris Lin, Fang Chuan Ho, and Mu-Yi Hua  »View Author Affiliations

Applied Optics, Vol. 38, Issue 25, pp. 5452-5457 (1999)

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The influence of the TiO2 concentration (≦10 at. %) on the structural and the optical properties of CaF2-rich CaF2–TiO2 composite films fabricated by reactive ion-assisted codeposition are investigated. The composition-dependent properties are found to be similar to those reported for composite films with higher TiO2 concentrations. The surface roughness of CaF2 films and their adhesion to a glass substrate are greatly improved by the addition of a small amount of TiO2. These composite films are quite suitable for IR coatings as a transparent, low-refractive-index material at wavelengths of <10 µm. Two examples, a Fabry–Perot filter and a mid-IR dichroic filter, of applications that use CaF2–TiO2 with 10-at. % TiO2 and Ge as low- and high-refractive-index coating materials, respectively, are presented.

© 1999 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

Original Manuscript: March 16, 1999
Revised Manuscript: June 7, 1999
Published: September 1, 1999

Rung-Ywan Tsai, Sen-Chrong Shiau, Doris Lin, Fang Chuan Ho, and Mu-Yi Hua, "Ion-assisted codeposition of CaF2-rich CaF2–TiO2 composites as infrared-transmitting films," Appl. Opt. 38, 5452-5457 (1999)

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