OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 28 — Oct. 1, 1999
  • pp: 5968–5973

Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry

Seung-Woo Kim and Gee-Hong Kim  »View Author Affiliations


Applied Optics, Vol. 38, Issue 28, pp. 5968-5973 (1999)
http://dx.doi.org/10.1364/AO.38.005968


View Full Text Article

Enhanced HTML    Acrobat PDF (573 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

White-light scanning interferometry is increasingly used for precision profile metrology of engineering surfaces, but its current applications are limited primarily to opaque surfaces with relatively simple optical reflection behavior. A new attempt is made to extend the interferometric method to the thickness-profile measurement of transparent thin-film layers. An extensive frequency-domain analysis of multiple reflection is performed to allow both the top and the bottom interfaces of a thin-film layer to be measured independently at the same time by the nonlinear least-squares technique. This rigorous approach provides not only point-by-point thickness probing but also complete volumetric film profiles digitized in three dimensions.

© 1999 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(240.0310) Optics at surfaces : Thin films
(310.6860) Thin films : Thin films, optical properties

History
Original Manuscript: January 4, 1999
Revised Manuscript: June 29, 1999
Published: October 1, 1999

Citation
Seung-Woo Kim and Gee-Hong Kim, "Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry," Appl. Opt. 38, 5968-5973 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-28-5968


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. G. S. Kino, S. S. C. Chim, “The Mirau correlation microscope,” Appl. Opt. 29, 3775–3783 (1990). [CrossRef] [PubMed]
  2. S. S. C. Chim, G. S. Kino, “Three-dimensional image realization in interference microscopy,” Appl. Opt. 31, 2550–2553 (1992). [CrossRef] [PubMed]
  3. P. J. Caber, “Interferometric profiler for rough surfaces,” Appl. Opt. 32, 3438–3441 (1993). [CrossRef] [PubMed]
  4. D. Cohen, P. J. Caber, C. Brophy, “Rough surface profiler and method,” U.S. patent5,133,601 (28July1992).
  5. P. de Groot, L. Deck, “Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms,” Opt. Lett. 18, 1462–1464 (1993). [CrossRef] [PubMed]
  6. L. Deck, P. de Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334–7338 (1994). [CrossRef] [PubMed]
  7. P. de Groot, L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency,” J. Mod. Opt. 42, 389–401 (1995). [CrossRef]
  8. K. G. Larkin, “Efficient nonlinear algorithm for envelope detection in white light interferometry,” J. Opt. Soc. Am. A 13, 832–843 (1996). [CrossRef]
  9. P. Sandoz, R. Devillers, A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44, 519–534 (1997). [CrossRef]
  10. P. Sandoz, “Wavelet transform as a processing tool in white-light interferometry,” Opt. Lett. 22, 1065–1067 (1997). [CrossRef] [PubMed]
  11. K. Creath, “Sampling requirements for white light interferometry,” presented at the Third International Workshop on Automatic Processing of Fringe Patterns, Bremen Institute of Applied Beam Technology, Bremen, Germany, 15–17 September 1997.
  12. L. J. Fried, H. A. Froot, “Thickness measurements of silicon dioxide films over small geometries,” J. Appl. Phys. 39, 5732–5735 (1968). [CrossRef]
  13. T. M. Merklein, “High resolution measurement of multilayer structures,” Appl. Opt. 29, 505–511 (1990). [CrossRef] [PubMed]
  14. S. Diddams, J. C. Diels, “Dispersion measurements with white-light interferometry,” J. Opt. Soc. Am. 13, 1120–1129 (1996). [CrossRef]
  15. R. Azzam, N. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1987), p. 283.
  16. F. F. Jenkins, H. E. White, Fundamentals of Optics, 4th ed. (McGraw-Hill, New York, 1976), p. 479.
  17. J. F. Biegen, “Determination of the phase change on reflection from two-beam interference,” Opt. Lett. 19, 1690–1692 (1994). [CrossRef] [PubMed]
  18. T. Doi, K. Toyoda, Y. Tanimura, “Effects of phase changes on reflection and their wavelength dependence in optical profilometry,” Appl. Opt. 36, 7157–7161 (1997). [CrossRef]
  19. G. D. Feke, D. P. Snow, R. D. Grober, P. de Groot, L. Deck, “Interferometric back focal plane microellipsometry,” Appl. Opt. 37, 1796–1802 (1998). [CrossRef]
  20. K. Leonhardt, U. Droste, H. J. Tiziani, “Topometry for locally changing materials,” Opt. Lett. 23, 1772–1174 (1998). [CrossRef]
  21. E. W. Rogala, H. H. Barrett, “Phase-shifting interferometer/ellipsometer capable of measuring the complex index of refraction and the surface profile of a test surface,” J. Opt. Soc. Am 15, 538–548 (1998). [CrossRef]
  22. The Levenberg-Marquardt function is available as leastsq in the matlab software. For details, refer to Optimization Toolbox for Use with matlab (MathWorks, Natick, Mass., 1992).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited