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Applied Optics

Applied Optics


  • Vol. 38, Iss. 28 — Oct. 1, 1999
  • pp: 6036–6039

Sensitivity enhancement of integrated optical sensors by use of thin high-index films

Geoffrey R. Quigley, Richard D. Harris, and James S. Wilkinson  »View Author Affiliations

Applied Optics, Vol. 38, Issue 28, pp. 6036-6039 (1999)

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The proportion of power carried in the superstrate medium by the guided modes of integrated optical waveguides can be increased by the addition of a thin high-index film. Enhanced refractive-index sensing is demonstrated with channel waveguide Mach–Zehnder interferometers with Ta2O5 overlays. Sensitivity increases by a factor greater than 50, and a detection limit better than 5 × 10-7 is obtained. This approach is broadly applicable to sensing at waveguide surfaces where the strength of evanescent fields dictates performance.

© 1999 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(130.0130) Integrated optics : Integrated optics
(130.6010) Integrated optics : Sensors
(240.0310) Optics at surfaces : Thin films

Original Manuscript: March 22, 1999
Revised Manuscript: July 20, 1999
Published: October 1, 1999

Geoffrey R. Quigley, Richard D. Harris, and James S. Wilkinson, "Sensitivity enhancement of integrated optical sensors by use of thin high-index films," Appl. Opt. 38, 6036-6039 (1999)

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