Abstract

We have fabricated the four flight gratings for a sounding rocket high-resolution spectrometer using a holographic ion-etching technique. The gratings are spherical (4000-mm radius of curvature), large (160 mm × 90 mm), and have a laminar groove profile of high density (3600 grooves/mm). They have been coated with a high-reflectance multilayer of Mo/Si. Using an atomic force microscope, we examined the surface characteristics of the first grating before and after multilayer coating. The average roughness is approximately 3 Å rms after coating. Using synchrotron radiation, we completed an efficiency calibration map over the wavelength range 225–245 Å. At an angle of incidence of 5° and a wavelength of 234 Å, the average efficiency in the first inside order is 10.4 ± 0.5%, and the derived groove efficiency is 34.8 ± 1.6%. These values exceed all previously published results for a high-density grating.

© 1999 Optical Society of America

Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: efficiency

Michael P. Kowalski, Troy W. Barbee, and William R. Hunter
Appl. Opt. 45(2) 322-334 (2006)

Investigation of the properties of an ion-etched plane laminar holographic grating

William R. Hunter, Michael P. Kowalski, Jack C. Rife, and Raymond G. Cruddace
Appl. Opt. 40(34) 6157-6165 (2001)

Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating

M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, and W. R. Hunter
Opt. Lett. 29(24) 2914-2916 (2004)

Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Å wavelength region

J. F. Seely, M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, J. C. Rife, and W. R. Hunter
Appl. Opt. 36(31) 8206-8213 (1997)

Normal-incidence efficiencies of 4800-grooves/mm-ruled replica gratings with multilayer and gold coatings in the 125–325-Å wavelength region

John F. Seely, Tetsuya Watanabe, Tatsuo Harada, Jack C. Rife, and William R. Hunter
Appl. Opt. 38(10) 1920-1925 (1999)