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Applied Optics

Applied Optics


  • Vol. 38, Iss. 31 — Nov. 1, 1999
  • pp: 6540–6549

Data-dependent systems profilometry of two-dimensional surfaces

Sudhakar M. Pandit and Duen Ping Chan  »View Author Affiliations

Applied Optics, Vol. 38, Issue 31, pp. 6540-6549 (1999)

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Fourier-transform profilometry (FTP) and data-dependent systems profilometry (DDSP) are two methods that are available for recovering one-dimensional fine surface profiles from the phase of a single interferogram. FTP has already been extended to two-dimensional surfaces; a similar extension of DDSP is introduced here. Inasmuch as this extension involves autoregressive modeling of the rows or columns of an interferogram, the feasibility of using a common model order is explored. The common order reduces not only the amount of computation but also the errors caused by the heterodyned phase-removal procedure. As autoregression requires masking the first few data values, the length of the mask is determined by means of a Green’s function. A comparison shows that DDSP outperforms FTP in roughness measurements in terms of rms and center-line average. The comparison also shows that DDSP is able to recover a detailed surface, whereas FTP outlines only the global features. An interferogram regeneration procedure provides a reference surface for the verification of results.

© 1999 Optical Society of America

OCIS Codes
(100.2650) Image processing : Fringe analysis
(100.5070) Image processing : Phase retrieval
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

Original Manuscript: August 2, 1999
Published: November 1, 1999

Sudhakar M. Pandit and Duen Ping Chan, "Data-dependent systems profilometry of two-dimensional surfaces," Appl. Opt. 38, 6540-6549 (1999)

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