Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Data-dependent systems profilometry of two-dimensional surfaces

Not Accessible

Your library or personal account may give you access

Abstract

Fourier-transform profilometry (FTP) and data-dependent systems profilometry (DDSP) are two methods that are available for recovering one-dimensional fine surface profiles from the phase of a single interferogram. FTP has already been extended to two-dimensional surfaces; a similar extension of DDSP is introduced here. Inasmuch as this extension involves autoregressive modeling of the rows or columns of an interferogram, the feasibility of using a common model order is explored. The common order reduces not only the amount of computation but also the errors caused by the heterodyned phase-removal procedure. As autoregression requires masking the first few data values, the length of the mask is determined by means of a Green’s function. A comparison shows that DDSP outperforms FTP in roughness measurements in terms of rms and center-line average. The comparison also shows that DDSP is able to recover a detailed surface, whereas FTP outlines only the global features. An interferogram regeneration procedure provides a reference surface for the verification of results.

© 1999 Optical Society of America

Full Article  |  PDF Article
More Like This
Comparison of Fourier-transform and data-dependent system profilometry by use of interferometric regeneration

Sudhakar M. Pandit and Duen Ping Chan
Appl. Opt. 38(19) 4095-4102 (1999)

Application of modulation measurement profilometry to objects with surface holes

Likun Su, Xianyu Su, Wansong Li, and Liqun Xiang
Appl. Opt. 38(7) 1153-1158 (1999)

Interferogram analysis based on the data-dependent systems method for nanometrology applications

S. M. Pandit and N. Jordache
Appl. Opt. 34(29) 6695-6703 (1995)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (19)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (4)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (20)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved