We deposited high-quality TiO<sub>2</sub> films by an oxygen-radical beam–assisted evaporation (RBE) method at a lower substrate temperature (Ts) than that for a TiO<sub>2</sub> film deposited by conventional thermal evaporation (TE) with neutral-oxygen gas. The films were then evaluated in terms of refractive index, shift of wavelength of a peak in the reflection curve, and absorption coefficient. The TiO<sub>2</sub> films deposited by RBE at Ts < 473 K showed higher refractive indices, were more compact, and had lower absorption coefficients than the film deposited by TE at Ts = 473 K.
© 1999 Optical Society of America
Yasumi Yamada, Haruo Uyama, Shigeyuki Watanabe, and Hisakazu Nozoye, "Deposition at Low Substrate Temperatures of High-Quality TiO2 Films by Radical Beam-Assisted Evaporation," Appl. Opt. 38, 6638-6641 (1999)