Optical frequency-domain imaging microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device
Applied Optics, Vol. 38, Issue 34, pp. 7063-7068 (1999)
http://dx.doi.org/10.1364/AO.38.007063
Acrobat PDF (926 KB)
Abstract
An optical frequency-domain interference microscope with a liquid-crystal Fabry–Perot interferometer as an optical frequency-scan device was developed for microscopic three-dimensional shape measurements. The proposed system can perform absolute measurement of the discontinuous surface profile of a microscopic object without use of mechanically moving components such as a piezoelectric transducer or a grating spectrometer. Experimental results are presented that demonstrate the validity of the principle.
© 1999 Optical Society of America
OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
Citation
Masaya Kinoshita, Mitsuo Takeda, Haruo Yago, Yoshihiko Watanabe, and Takashi Kurokawa, "Optical frequency-domain imaging microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device," Appl. Opt. 38, 7063-7068 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-34-7063
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