OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 4 — Feb. 1, 1999
  • pp: 655–659

Some Considerations of Reduction of Reference Phase Error in Phase-Stepping Interferometry

Johannes Schwider, Thomas Dresel, and Bernd Manzke  »View Author Affiliations


Applied Optics, Vol. 38, Issue 4, pp. 655-659 (1999)
http://dx.doi.org/10.1364/AO.38.000655


View Full Text Article

Acrobat PDF (695 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Positioning errors and miscalibrations of the phase-stepping device in a phase-stepping interferometer lead to systematic errors proportional to twice the measured phase distribution. We discuss the historical development of various error-compensating phase-shift algorithms from a unified mathematical point of view. Furthermore, we demonstrate experimentally that systematic errors can also be removed a posteriori. A Twyman–Green-type microlens test interferometer was used for the experiments.

© 1999 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(220.4840) Optical design and fabrication : Testing

Citation
Johannes Schwider, Thomas Dresel, and Bernd Manzke, "Some Considerations of Reduction of Reference Phase Error in Phase-Stepping Interferometry," Appl. Opt. 38, 655-659 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-4-655


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. H. J. Bruning, D. R. Herriot, J. E. Gallagher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, “Digital wavefront measuring interferometer for testing optical surfaces and lenses,” Appl. Opt. 13, 2693–2703 (1974).
  2. J. Schwider, B. Burow, K. E. Elsner, J. Grzanna, R. Spolaczyk, and K. Merkel, “Digital wavefront measuring interferometry: some systematic error sources,” Appl. Opt. 22, 3421–3432 (1983).
  3. K. Kinnstätter, A. W. Lohmann, J. Schwider, and N. Streibl, “Accuracy of phase shifting interferometry,” Appl. Opt. 27, 5082–5089 (1988).
  4. D. Malacara, Optical Shop Testing, Wiley Series in Pure and Applied Physics (Wiley, New York, 1990).
  5. P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm,” Appl. Opt. 26, 2504–2506 (1987).
  6. K. Creath, “Phase-measurement interferometry techniques,” Prog. Opt. 26, 349–393 (1988).
  7. J. Schwider, “Advanced evaluation techniques in interferometry,” Prog. Opt. 28, 271–359 (1990).
  8. M. F. Kuechel, “Some progress in phase measurement techniques,” in Fringe 97, Proceedings of the Third International Workshop on Automatic Processing of Fringe Patterns, Bremen, Akademie-Verlag Series in Optical Metrology, W. Jueptner and W. Osten, eds. (Akademie Verlag, Berlin, 1997), pp. 27–44.
  9. K. Hibino, B. F. Oreb, D. I. Farrant, and K. G. Larkin, “Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts,” J. Opt. Soc. Am. A 14, 918–930 (1997).
  10. Y. Surrel, “Design of algorithms for phase measurements by the use of phase stepping,” Appl. Opt. 35, 51–60 (1996).
  11. J. Schmit and K. Creath, “Extended averaging technique for derivation of error-compensating algorithms in phase shifting interferometry,” Appl. Opt. 34, 3610–3619 (1995).
  12. K. Hibino, “Susceptibility of systematic error-compensating algorithms to random noise in phase-shifting interferometry,” Appl. Opt. 36, 2084–2093 (1997).
  13. C. Rathjen, “Statistical properties of phase-shift algorithms,” J. Opt. Soc. Am. A 12, 1997–2008 (1997).
  14. K. Freischlad and Ch. L. Koliopoulos, “Fourier description of digital measuring interferometry,” J. Opt. Soc. Am. 7, 542–551 (1990).
  15. Y. Surrel, “Phase stepping: a new self-calibrating algorithm,” Appl. Opt. 32, 3598–3600 (1993).
  16. K. G. Larkin and B. F. Oreb, “Design and assessment of symmetrical phase-shifting algorithms,” J. Opt. Soc. Am. 9, 481–489 (1992).
  17. D. Malacara and D. Malacara-Doblado, “Error analysis of phase detection algorithms,” in Fringe 97, Proceedings of the Third International Workshop on Automatic Processing of Fringe Patterns, Bremen, Akademie-Verlag Series in Optical Metrology, W. Jueptner and W. Osten, eds. (Akademie Verlag, Berlin, 1997), pp. 45–51.
  18. J. Schwider, “Phase shifting interferometry: reference phase error reduction,” Appl. Opt. 28, 3889–3892 (1989).
  19. W. W. Macy, “Two-dimensional fringe-pattern analysis,” Appl. Opt. 22, 3898–3901 (1992).
  20. D. W. Robinson, Interferogram Analysis (Institute of Physics, Bristol, UK, 1990).
  21. J. Schwider and O. Falkenstörfer, “Twyman–Green interferometer for testing microspheres,” Opt. Eng. 34, 2972–2975 (1995).
  22. S. Haselbeck, H. Schreiber, J. Schwider, and N. Streibl, “Microlenses fabricated by melting photoresist,” Opt. Eng. 6, 1322–1324 (1993).
  23. M. Eisner and J. Schwider, “Transferring resist microlenses into silicon by reactive ion etching,” Opt. Eng. 35, 2979–2982 (1996).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited