Positioning errors and miscalibrations of the phase-stepping device in a phase-stepping interferometer lead to systematic errors proportional to twice the measured phase distribution. We discuss the historical development of various error-compensating phase-shift algorithms from a unified mathematical point of view. Furthermore, we demonstrate experimentally that systematic errors can also be removed <i>a posteriori</i>. A Twyman–Green-type microlens test interferometer was used for the experiments.
© 1999 Optical Society of America
(050.5080) Diffraction and gratings : Phase shift
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(220.4840) Optical design and fabrication : Testing
Johannes Schwider, Thomas Dresel, and Bernd Manzke, "Some Considerations of Reduction of Reference Phase Error in Phase-Stepping Interferometry," Appl. Opt. 38, 655-659 (1999)