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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 4 — Feb. 1, 1999
  • pp: 655–659

Some considerations of reduction of reference phase error in phase-stepping interferometry

Johannes Schwider, Thomas Dresel, and Bernd Manzke  »View Author Affiliations


Applied Optics, Vol. 38, Issue 4, pp. 655-659 (1999)
http://dx.doi.org/10.1364/AO.38.000655


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Abstract

Positioning errors and miscalibrations of the phase-stepping device in a phase-stepping interferometer lead to systematic errors proportional to twice the measured phase distribution. We discuss the historical development of various error-compensating phase-shift algorithms from a unified mathematical point of view. Furthermore, we demonstrate experimentally that systematic errors can also be removed a posteriori. A Twyman–Green-type microlens test interferometer was used for the experiments.

© 1999 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(220.4840) Optical design and fabrication : Testing

History
Original Manuscript: August 25, 1998
Revised Manuscript: August 25, 1998
Published: February 1, 1999

Citation
Johannes Schwider, Thomas Dresel, and Bernd Manzke, "Some considerations of reduction of reference phase error in phase-stepping interferometry," Appl. Opt. 38, 655-659 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-4-655

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