The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.
© 1999 Optical Society of America
Original Manuscript: July 8, 1998
Revised Manuscript: October 5, 1998
Published: February 1, 1999
Victor E. Asadchikov, Angela Duparré, Stefan Jakobs, Albert Yu. Karabekov, Igor V. Kozhevnikov, and Yury S. Krivonosov, "Comparative study of the roughness of optical surfaces and thin films by use of x-ray scattering and atomic force microscopy," Appl. Opt. 38, 684-691 (1999)