Comparative Study of the Roughness of Optical Surfaces and Thin Films by use of X-Ray Scattering and Atomic Force Microscopy
Applied Optics, Vol. 38, Issue 4, pp. 684-691 (1999)
http://dx.doi.org/10.1364/AO.38.000684
Acrobat PDF (360 KB)
Abstract
The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.
© 1999 Optical Society of America
[Optical Society of America ]
OCIS Codes
(180.0180) Microscopy : Microscopy
(240.5770) Optics at surfaces : Roughness
(290.0290) Scattering : Scattering
(310.0310) Thin films : Thin films
(340.0340) X-ray optics : X-ray optics
Citation
Victor E. Asadchikov, Angela Duparré, Stefan Jakobs, Albert Yu. Karabekov, Igor V. Kozhevnikov, and Yury S. Krivonosov, "Comparative Study of the Roughness of Optical Surfaces and Thin Films by use of X-Ray Scattering and Atomic Force Microscopy," Appl. Opt. 38, 684-691 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-4-684
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Light scattering from slightly rough dielectric films (JOSAA)
- Interfacial Roughness and Related Scatter in Ultraviolet Optical Coatings: A Systematic Experimental Approach (AO)
- Angle-resolved scattering: an effective method for characterizing thin-film coatings (AO)
- Instrument for close-to-process light scatter measurements of thin film coatings and substrates (AO)
- Optical component interface scatter characterization by selective polarization extinction (AO)
Related Conference Papers
- Near-Field Inverse Scattering: The Current State of Theory and Experiment
- Novel Technique to Remove Measurement Noise Generated by Pinhole Diffraction Phenomenon
- Novel Technique to Remove Measurement Noise Generated by Pinhole Diffraction Phenomenon
- Optical Scattering of Confocal Laser Scanning Reflectance Microscopy in Turbid Media
- High-resolution EUV imaging using high harmonic generation
« Previous Article | Next Article »
OSA is a member of 