Design and manufacture of all-dielectric nonpolarizing beam splitters

Jerzy Ciosek; J. A. Dobrowolski; Glenn A. Clarke; George Laframboise

doi:10.1364/AO.38.001244

Applied Optics
Vol. 38,
Issue 7,
pp. 1244-1250
(1999)
•https://doi.org/10.1364/AO.38.001244

Design and manufacture of all-dielectric nonpolarizing beam splitters

Jerzy Ciosek, J. A. Dobrowolski, Glenn A. Clarke, and George Laframboise

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Jerzy Ciosek, J. A. Dobrowolski, Glenn A. Clarke, and George Laframboise, "Design and manufacture of all-dielectric nonpolarizing beam splitters," Appl. Opt. 38, 1244-1250 (1999)

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Abstract

Past research on all-dielectric nonpolarizing beam splitters is reviewed. It is shown that, for a 50-nm spectral region, it is possible to design and manufacture a two-material nonpolarizing plate beam splitter for use at an angle of 45° (with a measured rms reflectance of 0.50 ± 0.01 for both s- and p-polarized incident light).

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Wavelength (nm)	Solid Quartz	Evaporated		Sputtered
Wavelength (nm)	Solid Quartz	SiO₂	Ta₂O₅	SiO₂	Nb₂O₅
400	1.4701	1.4630	2.3464	1.4758	2.5005
425	1.4676	1.4601	2.3192	1.4738	2.4519
450	1.4656	1.4582	2.2972	1.4723	2.4139
475	1.4638	1.4569	2.2793	1.4711	2.3839
500	1.4623	1.4554	2.2645	1.4702	2.3596
525	1.4610	1.4540	2.2520	1.4694	2.3398
550	1.4599	1.4530	2.2415	1.4688	2.3235
575	1.4589	1.4520	2.2326	1.4684	2.3098
600	1.4580	1.4510	2.2248	1.4680	2.2982
625	1.4573	1.4499	2.2181	1.4676	2.2883
650	1.4565	1.4491	2.2123	1.4673	2.2797
675	1.4559	1.4485	2.2071	1.4671	2.2723
700	1.4553	1.4480	2.2026	1.4669	2.2659

Layer Systems		Deposition Method
		Without Reoptimization		With Reoptimization
		Original d	Determ. d	Original d	Reoptim. d	Determ. d
Layer No.	Materials	(nm)	(nm)	(nm)	(nm)	(nm)
substrate	quartz
1	Nb₂O₅	89.1	88.6	89.3	89.3	89.3
2	SiO₂	173.0	173.7	172.3	172.3	172.0
3	Nb₂O₅	76.9	76.6	77.1	77.5	77.2
4	SiO₂	121.0	121.6	121.6	122.1	122.1
5	Nb₂O₅	67.7	67.3	68.2	67.8	67.6
6	SiO₂	146.5	146.5	144.6	144.6	144.7
7	Nb₂O₅	108.8	108.7	109.3	109.4	109.1
8	SiO₂	120.0	120.2	120.7	122.0	122.8
9	Nb₂O₅	61.8	61.5	61.4	60.0	59.9
10	SiO₂	106.0	107.0	106.3	107.1	107.2
11	Nb₂O₅	57.4	57.1	57.2	57.2	56.9
12	SiO₂	95.1	95.8	95.3	96.4	97.0
13	Nb₂O₅	46.4	46.3	46.1	45.7	45.4
14	SiO₂	71.8	72.0	73.0	73.6	74.0
15	Nb₂O₅	37.7	37.7	37.2	36.7	36.6
16	SiO₂	73.9	73.9	73.4	73.8	74.0
17	Nb₂O₅	45.0	44.9	45.5	45.2	45.1
18	SiO₂	92.7	92.9	92.7	93.8	93.4
19	Nb₂O₅	56.4	56.2	55.7	56.6	56.3
20	SiO₂	101.5	102.2	103.5	102.5	103.4
21	Nb₂O₅	59.3	59.2	59.7	58.6	58.3
22	SiO₂	25.7	26.3	24.6	26.8	26.3
23	Nb₂O₅	32.1	31.9	32.4	32.1	32.2
24	SiO₂	39.9	39.9	39.5	38.4	38.1
medium	air
∑d		1905.7	1908.1	1906.6	1909.7	1909.1

Wavelength (nm)	Solid Quartz	Evaporated		Sputtered
Wavelength (nm)	Solid Quartz	SiO₂	Ta₂O₅	SiO₂	Nb₂O₅
400	1.4701	1.4630	2.3464	1.4758	2.5005
425	1.4676	1.4601	2.3192	1.4738	2.4519
450	1.4656	1.4582	2.2972	1.4723	2.4139
475	1.4638	1.4569	2.2793	1.4711	2.3839
500	1.4623	1.4554	2.2645	1.4702	2.3596
525	1.4610	1.4540	2.2520	1.4694	2.3398
550	1.4599	1.4530	2.2415	1.4688	2.3235
575	1.4589	1.4520	2.2326	1.4684	2.3098
600	1.4580	1.4510	2.2248	1.4680	2.2982
625	1.4573	1.4499	2.2181	1.4676	2.2883
650	1.4565	1.4491	2.2123	1.4673	2.2797
675	1.4559	1.4485	2.2071	1.4671	2.2723
700	1.4553	1.4480	2.2026	1.4669	2.2659

Layer Systems		Deposition Method
		Without Reoptimization		With Reoptimization
		Original d	Determ. d	Original d	Reoptim. d	Determ. d
Layer No.	Materials	(nm)	(nm)	(nm)	(nm)	(nm)
substrate	quartz
1	Nb₂O₅	89.1	88.6	89.3	89.3	89.3
2	SiO₂	173.0	173.7	172.3	172.3	172.0
3	Nb₂O₅	76.9	76.6	77.1	77.5	77.2
4	SiO₂	121.0	121.6	121.6	122.1	122.1
5	Nb₂O₅	67.7	67.3	68.2	67.8	67.6
6	SiO₂	146.5	146.5	144.6	144.6	144.7
7	Nb₂O₅	108.8	108.7	109.3	109.4	109.1
8	SiO₂	120.0	120.2	120.7	122.0	122.8
9	Nb₂O₅	61.8	61.5	61.4	60.0	59.9
10	SiO₂	106.0	107.0	106.3	107.1	107.2
11	Nb₂O₅	57.4	57.1	57.2	57.2	56.9
12	SiO₂	95.1	95.8	95.3	96.4	97.0
13	Nb₂O₅	46.4	46.3	46.1	45.7	45.4
14	SiO₂	71.8	72.0	73.0	73.6	74.0
15	Nb₂O₅	37.7	37.7	37.2	36.7	36.6
16	SiO₂	73.9	73.9	73.4	73.8	74.0
17	Nb₂O₅	45.0	44.9	45.5	45.2	45.1
18	SiO₂	92.7	92.9	92.7	93.8	93.4
19	Nb₂O₅	56.4	56.2	55.7	56.6	56.3
20	SiO₂	101.5	102.2	103.5	102.5	103.4
21	Nb₂O₅	59.3	59.2	59.7	58.6	58.3
22	SiO₂	25.7	26.3	24.6	26.8	26.3
23	Nb₂O₅	32.1	31.9	32.4	32.1	32.2
24	SiO₂	39.9	39.9	39.5	38.4	38.1
medium	air
∑d		1905.7	1908.1	1906.6	1909.7	1909.1

Abstract

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Tables (2)

Applied Optics