Monolithically Integrated Optical Displacement Sensor Based on Triangulation and Optical Beam Deflection
Applied Optics, Vol. 38, Issue 9, pp. 1746-1751 (1999)
http://dx.doi.org/10.1364/AO.38.001746
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Abstract
A monolithically integrated optical displacement sensor based on triangulation and optical beam deflection is reported. This sensor is simple and consists of only a laser diode, a polyimide waveguide, and a split detector (a pair of photodiodes) upon a GaAs substrate. The resultant prototype device is extremely small (750 μm × 800 μm). Experiments have shown that this sensor can measure the displacement of a mirror with resolution of better than 4 nm. Additionally, we have experimentally demonstrated both axial and lateral displacement measurements when we used a cylindrical micromirror (diameter, 125 μm) as a movable external object.
© 1999 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(130.6010) Integrated optics : Sensors
(230.0230) Optical devices : Optical devices
(280.3420) Remote sensing and sensors : Laser sensors
Citation
Eiji Higurashi, Renshi Sawada, and Takahiro Ito, "Monolithically Integrated Optical Displacement Sensor Based on Triangulation and Optical Beam Deflection," Appl. Opt. 38, 1746-1751 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-9-1746
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