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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 9 — Mar. 20, 1999
  • pp: 1746–1751

Monolithically Integrated Optical Displacement Sensor Based on Triangulation and Optical Beam Deflection

Eiji Higurashi, Renshi Sawada, and Takahiro Ito  »View Author Affiliations


Applied Optics, Vol. 38, Issue 9, pp. 1746-1751 (1999)
http://dx.doi.org/10.1364/AO.38.001746


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Abstract

A monolithically integrated optical displacement sensor based on triangulation and optical beam deflection is reported. This sensor is simple and consists of only a laser diode, a polyimide waveguide, and a split detector (a pair of photodiodes) upon a GaAs substrate. The resultant prototype device is extremely small (750 μm × 800 μm). Experiments have shown that this sensor can measure the displacement of a mirror with resolution of better than 4 nm. Additionally, we have experimentally demonstrated both axial and lateral displacement measurements when we used a cylindrical micromirror (diameter, 125 μm) as a movable external object.

© 1999 Optical Society of America

OCIS Codes
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(130.6010) Integrated optics : Sensors
(230.0230) Optical devices : Optical devices
(280.3420) Remote sensing and sensors : Laser sensors

Citation
Eiji Higurashi, Renshi Sawada, and Takahiro Ito, "Monolithically Integrated Optical Displacement Sensor Based on Triangulation and Optical Beam Deflection," Appl. Opt. 38, 1746-1751 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-9-1746

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