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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 1 — Jan. 1, 2000
  • pp: 157–167

High-Rate Automated Deposition System for the Manufacture of Complex Multilayer Coatings

Brian T. Sullivan, Glenn A. Clarke, Takayuki Akiyama, Norman Osborne, Martial Ranger, J. A. Dobrowolski, Louisa Howe, Akira Matsumoto, Yizhou Song, and Kazuo Kikuchi  »View Author Affiliations


Applied Optics, Vol. 39, Issue 1, pp. 157-167 (2000)
http://dx.doi.org/10.1364/AO.39.000157


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Abstract

A previously described automated thin-film deposition system based on rf-magnetron sputtering could deposit quite complex optical multilayer systems with good precision and with no one in attendance [Sullivan and Dobrowolski, Appl. Opt. <b>32,</b> 2351–2360 (1993)]. However, the deposition rate was slow, and the uniform area on the substrate was limited. We describe an ac-magnetron sputtering process in which the same deposition accuracy has been combined with significantly better film uniformity and a fivefold or sevenfold increase in the deposition rate. This makes the equipment of commercial interest. Experimental results are presented for several difficult coating problems.

© 2000 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

Citation
Brian T. Sullivan, Glenn A. Clarke, Takayuki Akiyama, Norman Osborne, Martial Ranger, J. A. Dobrowolski, Louisa Howe, Akira Matsumoto, Yizhou Song, and Kazuo Kikuchi, "High-Rate Automated Deposition System for the Manufacture of Complex Multilayer Coatings," Appl. Opt. 39, 157-167 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-1-157


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References

  1. J. A. Dobrowolski, “Modern computational methods for optical thin film systems,” Thin Solid Films 34, 313–321 (1976).
  2. B. T. Sullivan and J. A. Dobrowolski, “Deposition error compensation for optical multilayer coatings. II. Experimental results—sputtering system,” Appl. Opt. 32, 2351–2360 (1993).
  3. B. T. Sullivan and J. A. Dobrowolski, “Implementation of a numerical needle method for thin-film design,” Appl. Opt. 35, 5484–5492 (1996).
  4. J. A. Dobrowolski, J. R. Pekelsky, R. Pelletier, M. Ranger, B. T. Sullivan, and A. J. Waldorf, “A practical magnetron sputtering system for the deposition of optical multilayer coatings,” Appl. Opt. 31, 3784–3789 (1992).
  5. B. T. Sullivan and K. L. Byrt, “Metal/dielectric transmission interference filters with low reflectance. II. Experimental results,” Appl. Opt. 34, 5684–5694 (1995).
  6. B. T. Sullivan and J. A. Dobrowolski, “Integrated design and manufacture of thin film multilayer filters using an automated deposition system,” Phys. Can. 52, 213–215 (1996).
  7. B. T. Sullivan, J. A. Dobrowolski, G. Clarke, T. Akiyama, N. Osborne, M. Ranger, L. Howe, A. Matsumoto, Y. Song, and K. Kikuchi, “Manufacture of complex multilayer filters using an automated deposition system,” Vacuum 51, 647–654 (1998).
  8. W. P. Thoeni, “Deposition of optical coatings: process control and automation,” Thin Solid Films 88, 385–397 (1982).

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