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Applied Optics

Applied Optics


  • Vol. 39, Iss. 10 — Apr. 1, 2000
  • pp: 1527–1530

Diffractive grazing-incidence interferometer

Peter de Groot  »View Author Affiliations

Applied Optics, Vol. 39, Issue 10, pp. 1527-1530 (2000)

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I propose a symmetric geometry for grazing-incidence interferometry of flat surfaces using diffraction gratings for beam splitting and recombination. The geometry employs a reference mirror to correct for relative inversion of the measurement and reference wave fronts. Preliminary testing with a 4-µm equivalent-wavelength system shows a 3σ repeatability of 20 nm for both smooth and rough surfaces, including a variety of precision-engineered metal, ceramic, and glass objects. The system has a comfortable working distance and large field of view, suitable for production testing.

© 2000 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(150.3040) Machine vision : Industrial inspection
(220.4840) Optical design and fabrication : Testing

Original Manuscript: July 30, 1999
Revised Manuscript: January 3, 2000
Published: April 1, 2000

Peter de Groot, "Diffractive grazing-incidence interferometer," Appl. Opt. 39, 1527-1530 (2000)

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