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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 13 — May. 1, 2000
  • pp: 2101–2106

Fringe modulation skewing effect in white-light vertical scanning interferometry

Akiko Harasaki and James C. Wyant  »View Author Affiliations


Applied Optics, Vol. 39, Issue 13, pp. 2101-2106 (2000)
http://dx.doi.org/10.1364/AO.39.002101


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Abstract

An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain the effect.

© 2000 Optical Society of America

OCIS Codes
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.3170) Microscopy : Interference microscopy

History
Original Manuscript: September 7, 1999
Revised Manuscript: January 13, 2000
Published: May 1, 2000

Citation
Akiko Harasaki and James C. Wyant, "Fringe modulation skewing effect in white-light vertical scanning interferometry," Appl. Opt. 39, 2101-2106 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-13-2101


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References

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  17. Estimating the centroid of function m(i)[x, y] = {I(i)[x, y] - I(i - 1)[x, y]}2 gives the surface height h[x, y] at lateral position [x, y], where I(i)[x, y] is the intensity of vertical scanning position i in a correlogram for scanning steps of 90° and 270°. It can easily be shown that z¯=∑i imix, y∑i mix, y=h+Γ′4/λcos2π4/λh2πΓ0+Γ4/λsin2π4/λh for the symmetric coherence function, where Γ and Γ′ are the Fourier transform of the coherence function and its first derivative, respectively, and λ̅ is the mean wavelength of the white-light source. From knowledge of the coherence function we know that the second term is very small; thus the centroid of function m(i) is a good estimator of surface height h.
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