Abstract
We describe a method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution of phase-shifting interferometry without the interval-slope limitation of λ/4 per data sample of phase-shifting interferometry. A five-frame algorithm is used to determine both the best-focus frame position and the fractional phase from the best-focus frame of the correlogram acquired through vertical scanning. The two surface profiles retrieved from the phase and the modulation contrast of the correlograms are compared in the phase-unwrapping process to remove fringe-order ambiguity.
© 2000 Optical Society of America
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