OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 13 — May. 1, 2000
  • pp: 2107–2115

Improved vertical-scanning interferometry

Akiko Harasaki, Joanna Schmit, and James C. Wyant  »View Author Affiliations


Applied Optics, Vol. 39, Issue 13, pp. 2107-2115 (2000)
http://dx.doi.org/10.1364/AO.39.002107


View Full Text Article

Enhanced HTML    Acrobat PDF (619 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We describe a method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution of phase-shifting interferometry without the interval-slope limitation of λ/4 per data sample of phase-shifting interferometry. A five-frame algorithm is used to determine both the best-focus frame position and the fractional phase from the best-focus frame of the correlogram acquired through vertical scanning. The two surface profiles retrieved from the phase and the modulation contrast of the correlograms are compared in the phase-unwrapping process to remove fringe-order ambiguity.

© 2000 Optical Society of America

OCIS Codes
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.3170) Microscopy : Interference microscopy

History
Original Manuscript: September 10, 1999
Revised Manuscript: February 4, 2000
Published: May 1, 2000

Citation
Akiko Harasaki, Joanna Schmit, and James C. Wyant, "Improved vertical-scanning interferometry," Appl. Opt. 39, 2107-2115 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-13-2107

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited