OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 13 — May. 1, 2000
  • pp: 2122–2129

Interference Imaging for Aspheric Surface Testing

Paul E. Murphy, Thomas G. Brown, and Duncan T. Moore  »View Author Affiliations


Applied Optics, Vol. 39, Issue 13, pp. 2122-2129 (2000)
http://dx.doi.org/10.1364/AO.39.002122


View Full Text Article

Acrobat PDF (839 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Peak–valley accuracy of λ/20 over a range of 2λ is not unusual in an interferometric null test. For the larger dynamic ranges of a nonnull test, however, the fringe-imaging optics degrades the accuracy. We classify the errors introduced and analyze them in the context of both general and third-order aberration theory. We can predict the measurement error from known interferometer parameters, and we illustrate this for a single mirror. The errors are tabulated for the specific case of a fourth-order asphere with 100 μm of sag. We show that the third-order approximation is comparable with exact ray-trace results for this case.

© 2000 Optical Society of America

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Citation
Paul E. Murphy, Thomas G. Brown, and Duncan T. Moore, "Interference Imaging for Aspheric Surface Testing," Appl. Opt. 39, 2122-2129 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-13-2122


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. A. Offner and D. Malacara, “Null tests using compensators,” in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, New York, 1992), pp. 427–454.
  2. R. J. Palum and J. E. Greivenkamp, “Sub-Nyquist interferometry: results and implementation issues,” in Laser Interferometry: Qualitative Analysis of Interferograms: Third in a Series, J. E. Wampler, ed., Proc. SPIE 1162, 378–388 (1989)
  3. J. E. Greivenkamp, A. E. Lowman, and R. J. Palum, “Sub-Nyquist interferometry: implementation and measurement capability,” Opt. Eng. 35, 2962–2969 (1996).
  4. P. E. Murphy, T. G. Brown, and D. T. Moore, “Optical Vernier interferometry for apsheric metrology,” in Emerging Lithographic Technologies III, Y. Vladimirsky, ed., Proc. SPIE 3676, 643–652 (1999).
  5. J. E. Greivenkamp, “Sub-Nyquist interferometry,” Appl. Opt. 26, 5245–5258 (1987).
  6. J. E. Greivenkamp and A. E. Lowman, “Modulation transfer function measurement of sparse-array sensors using a self-calibrating fringe pattern,” Appl. Opt. 33, 5029–5036 (1994).
  7. Y.-Y. Cheng and J. C. Wyant, “Two-wavelength phase shifting interferometry,” Appl. Opt. 23, 4539–4543 (1984).
  8. R. Jozwicki, “Influence of aberrations of Fizeau interferometer elements on measurement errors,” Appl. Opt. 30, 3126–3132 (1991).
  9. A. E. Lowman and J. E. Grivenkamp, “Interferometer induced wavefront errors when testing in a non-null configuration,” in Interferometry VI: Applications, R. J. Pryptniewicz, G. M. Brown, and W. E. Jeuptner, eds., Proc. SPIE 2004, 173–181 (1993).
  10. A. E. Lowman and J. E. Grievenkamp, “Modeling an interferometer for non-null testing of aspheres,” in Optical Manufacturing and Testing, V. J. Daugherty and H. Stabl, eds., Proc. SPIE 2536, 139–147 (1995).
  11. C. J. Evans, “Software based improvements in the accuracy of measurement of aspherics using a Fizeau inteferometer,” in Optical Fabrication and Testing, Vol. 13 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), pp. 259–262.
  12. C. J. Evans, “Compensation for errors introduced by non-zero fringe densities in phase-measuring interferometers,” CIRP Annals 42/1, 577–580 (1993).
  13. R. E. Parks, C. J. Evans, P. J. Sullivan, L. Z. Shao, and B. Loucks, “Measurements of the LIGO Pathfinder optics,” in Optical Manufacturing and Testing II, H. Stahl, ed., Proc. SPIE 3134, 95–111 (1997).
  14. H. Kurita, K. Saito, M. Kato, and T. Yatagai, “Influence of system aberrations on interferometric aspheric surface testing,” in Laser and Nonlinear Optical Materials, L. G. DeShazer, ed., Proc. SPIE 680, 47–52 (1987).
  15. C. Huang, “Propagation errors in precision Fizeau interferometry,” Appl. Opt. 32, 7016–7021 (1993).
  16. D. Malacara, “Twyman-Green interferometer,” in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, New York, 1992), pp. 51–94.
  17. W. T. Welford, Aberrations of Optical Systems (A. Hilger, Boston, 1986).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited