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Applied Optics

Applied Optics


  • Vol. 39, Iss. 13 — May. 1, 2000
  • pp: 2122–2129

Interference imaging for aspheric surface testing

Paul E. Murphy, Thomas G. Brown, and Duncan T. Moore  »View Author Affiliations

Applied Optics, Vol. 39, Issue 13, pp. 2122-2129 (2000)

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Peak–valley accuracy of λ/20 over a range of 2λ is not unusual in an interferometric null test. For the larger dynamic ranges of a nonnull test, however, the fringe-imaging optics degrades the accuracy. We classify the errors introduced and analyze them in the context of both general and third-order aberration theory. We can predict the measurement error from known interferometer parameters, and we illustrate this for a single mirror. The errors are tabulated for the specific case of a fourth-order asphere with 100 µm of sag. We show that the third-order approximation is comparable with exact ray-trace results for this case.

© 2000 Optical Society of America

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Original Manuscript: October 7, 1999
Revised Manuscript: January 21, 2000
Published: May 1, 2000

Paul E. Murphy, Thomas G. Brown, and Duncan T. Moore, "Interference imaging for aspheric surface testing," Appl. Opt. 39, 2122-2129 (2000)

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