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Applied Optics

Applied Optics


  • Vol. 39, Iss. 13 — May. 1, 2000
  • pp: 2159–2166

Phase effects in double-focus and double-aperture interference microscopy

Sarah A. Barman, John G. Walker, John W. Nunn, Nicholas P. Turner, and Michael J. Downs  »View Author Affiliations

Applied Optics, Vol. 39, Issue 13, pp. 2159-2166 (2000)

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Two different optical techniques for surface tracking and linewidth measurement are evaluated. First, an evaluation is made of the performance of a double-focus polarization microscope, based on results from a computer model and from experimental measurements. The assessment shows that a phase curvature effect makes the operation of this configuration impractical as a surface tracking device and linewidth measurement system. An alternative arrangement of using a double aperture is evaluated. The phase curvature effect is reduced in this type of microscope. A practical optical arrangement to implement a double-aperture microscope is given.

© 2000 Optical Society of America

OCIS Codes
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(180.3170) Microscopy : Interference microscopy

Original Manuscript: August 25, 1999
Revised Manuscript: February 10, 2000
Published: May 1, 2000

Sarah A. Barman, John G. Walker, John W. Nunn, Nicholas P. Turner, and Michael J. Downs, "Phase effects in double-focus and double-aperture interference microscopy," Appl. Opt. 39, 2159-2166 (2000)

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