A chemical cleaving method to improve the resolution of relief modulation in dichromated gelatin is presented. The process (which uses hydroxylamine) yields higher relief resolution and better profile fidelity than a process that uses the enzyme trypsin because it has many fewer cleaving sites. Experiments prove that relief modulation can produce a resolution of as much as 500 lines/mm. With a projection exposure system, a microprism array with a 30-μm-wide, 0.8-μm-high cell is fabricated by this method. A method for forming a continuous relief on dichromated gelatin is also discussed.
© 2000 Optical Society of America
(000.1570) General : Chemistry
(050.1970) Diffraction and gratings : Diffractive optics
(160.4670) Materials : Optical materials
(220.3740) Optical design and fabrication : Lithography
(230.4000) Optical devices : Microstructure fabrication
Lin Pang, Yingbai Yan, Guofan Jin, and Minxian Wu, "Chemical Cleaving Method of Relief Microstructure Formation on Dichromated Gelatin," Appl. Opt. 39, 2184-2188 (2000)