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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 13 — May. 1, 2000
  • pp: 2184–2188

Chemical cleaving method of relief microstructure formation on dichromated gelatin

Lin Pang, Yingbai Yan, Guofan Jin, and Minxian Wu  »View Author Affiliations


Applied Optics, Vol. 39, Issue 13, pp. 2184-2188 (2000)
http://dx.doi.org/10.1364/AO.39.002184


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Abstract

A chemical cleaving method to improve the resolution of relief modulation in dichromated gelatin is presented. The process (which uses hydroxylamine) yields higher relief resolution and better profile fidelity than a process that uses the enzyme trypsin because it has many fewer cleaving sites. Experiments prove that relief modulation can produce a resolution of as much as 500 lines/mm. With a projection exposure system, a microprism array with a 30-µm-wide, 0.8-µm-high cell is fabricated by this method. A method for forming a continuous relief on dichromated gelatin is also discussed.

© 2000 Optical Society of America

OCIS Codes
(000.1570) General : Chemistry
(050.1970) Diffraction and gratings : Diffractive optics
(160.4670) Materials : Optical materials
(220.3740) Optical design and fabrication : Lithography
(230.4000) Optical devices : Microstructure fabrication

History
Original Manuscript: August 23, 1999
Revised Manuscript: December 23, 1999
Published: May 1, 2000

Citation
Lin Pang, Yingbai Yan, Guofan Jin, and Minxian Wu, "Chemical cleaving method of relief microstructure formation on dichromated gelatin," Appl. Opt. 39, 2184-2188 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-13-2184

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