A system for measuring the gap in a proximity exposure tool of a plasma display panel (PDP) is developed that uses single or dual position-sensitive detectors (PSD’s). The resolution of the gap distance is 0.5 μm, with a capture range of 500 μm. Signal processing is simple and fast and easy because analogous PSD’s are used as the position sensors. One PSD is used to detect the position of the reference beam, which is reflected from the upper surface of the gap; the other PSD is used to detect the position of the signal beam, which is reflected from the lower surface of the gap. A charge-coupled-device sensor is also employed to monitor the reflected beams and the region of measurement. In the gap-measurement system that uses a single PSD, first the reference beam is incident upon the PSD and then the signal beam is incident upon the same PSD. Then the separation between the two beams is calculated from the position of the reference beam and from the average beam position.

© 2000 Optical Society of America

[Optical Society of America ]

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

Related Journal Articles

• Wave-Front Sensing with a Sampling Field Sensor (AO)
• Feasibility of an Airborne TV Camera as a Size Spectrometer for Cloud Droplets in Daylight (AO)
• Improved Angle Interferometer Based on Total Internal Reflection (AO)
• General and Self-Consistent Method for the Calibration of Polarization Modulators, Polarimeters, and Mueller-Matrix Ellipsometers (AO)
• Laboratory Imaging Stellar Interferometer with Fiber Links (AO)

Related Conference Papers

• Fiber Based Frequency Comb Lasers and Their Applications
• Ferrofluid Based Deformable Mirrors for Adaptive Optics
• Ferrofluid Based Deformable Mirrors for Adaptive Optics
• Use of Sequence of "Chirped" Femtosecond Pulses for Measurement of Small Surface Displacements
• Dispersion-Free Wide-Range Sub-nm Scale Using Tunable Diode Laser and Optical Frequency Comb Generator