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Applied Optics

Applied Optics


  • Vol. 39, Iss. 16 — Jun. 1, 2000
  • pp: 2646–2652

Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer

Takamasa Suzuki, Katsuyuki Kobayashi, and Osami Sasaki  »View Author Affiliations

Applied Optics, Vol. 39, Issue 16, pp. 2646-2652 (2000)

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A two-wavelength interferometer that uses two separate modulating currents with different phases but the same frequencies to detect a greater degree of object displacement in real time is proposed and demonstrated. The measurement error was 57 nm, roughly 1/80 of the synthetic wavelength. We have confirmed that this modulating technique enables us to equip our prototype interferometer with a simple feedback-control system that eliminates external disturbance.

© 2000 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(140.2020) Lasers and laser optics : Diode lasers

Original Manuscript: October 18, 1999
Revised Manuscript: February 2, 2000
Published: June 1, 2000

Takamasa Suzuki, Katsuyuki Kobayashi, and Osami Sasaki, "Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer," Appl. Opt. 39, 2646-2652 (2000)

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