Real-Time Displacement Measurement with a Two-Wavelength Sinusoidal Phase-Modulating Laser Diode Interferometer
Applied Optics, Vol. 39, Issue 16, pp. 2646-2652 (2000)
http://dx.doi.org/10.1364/AO.39.002646
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Abstract
A two-wavelength interferometer that uses two separate modulating currents with different phases but the same frequencies to detect a greater degree of object displacement in real time is proposed and demonstrated. The measurement error was 57 nm, roughly 1/80 of the synthetic wavelength. We have confirmed that this modulating technique enables us to equip our prototype interferometer with a simple feedback-control system that eliminates external disturbance.
© 2000 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(140.2020) Lasers and laser optics : Diode lasers
Citation
Takamasa Suzuki, Katsuyuki Kobayashi, and Osami Sasaki, "Real-Time Displacement Measurement with a Two-Wavelength Sinusoidal Phase-Modulating Laser Diode Interferometer," Appl. Opt. 39, 2646-2652 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-16-2646
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