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Applied Optics

Applied Optics


  • Vol. 39, Iss. 16 — Jun. 1, 2000
  • pp: 2658–2663

Measurement of transparent plates with wavelength-tuned phase-shifting interferometry

Peter de Groot  »View Author Affiliations

Applied Optics, Vol. 39, Issue 16, pp. 2658-2663 (2000)

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A wavelength-tuned Fizeau interferometer is applied to the problem of flatness testing of transparent plates. When the plate is positioned at a specific distance from the reference surface and an integer-math 13-frame phase-shifting algorithm is applied, the system directly filters out unwanted interference arising from backsurface reflections. The resulting front-surface profile exhibits less than 2 nm of residual error attributable to spurious reflections from within the plate.

© 2000 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.4840) Optical design and fabrication : Testing

Original Manuscript: October 28, 1999
Revised Manuscript: February 16, 2000
Published: June 1, 2000

Peter de Groot, "Measurement of transparent plates with wavelength-tuned phase-shifting interferometry," Appl. Opt. 39, 2658-2663 (2000)

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  1. J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, “Digital wave front measuring interferometry: some systematic error sources,” Appl. Opt. 22, 3421–3432 (1983). [CrossRef]
  2. K. Freischlad, “Large flat panel profiler,” in Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, J. C. Stover, ed., Proc. SPIE2862, 163–171 (1996). [CrossRef]
  3. P. G. Dewa, A. W. Kulawiec, “Grazing incidence interferometry for measuring transparent plane-parallel plates,” U.S. patent5,923,425 (13July1999).
  4. P. de Groot, “Grating interferometer for metrology of transparent flats,” in Optical Fabrication and Testing, Vol. 6 of 1996 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1996), pp. 28–30.
  5. C. Ai, “Multimode-laser interferometric apparatus for elimination background interference fringes from thin-plate measurements,” U.S. patent5,452,088 (19September1995).
  6. P. de Groot, “Metrology of transparent flats,” in Optical Fabrication and Testing Workshop, Vol. 13 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), pp. 160–168.
  7. K. Okada, J. Tsujiuchi, “Wavelength scanning interferometry for the measurement of both surface shapes and refractive index inhomogeneity,” in Laser Interferometry: Quantitative Analysis of Interferograms, R. J. Pryputniewicz, ed., Proc. SPIE1162, 395–401 (1989).
  8. K. Okada, H. Sakuta, T. Ose, J. Tsujiuchi, “Separate measurements of surface shapes and refractive index inhomogeneity of an optical element using tunable-source phase shifting interferometry,” Appl. Opt. 29, 3280–3285 (1990). [CrossRef] [PubMed]
  9. G. E. Sommargren, “Interferometric wavefront measurement,” U.S. patent4,594,003 (10June1986).
  10. P. S. Fairman, B. K. Ward, B. F. Oreb, D. I. Farrant, “300-mm aperture phase shifting Fizeau interferometer,” Opt. Eng. 38, 1371–1380 (1999). [CrossRef]
  11. K. G. Larkin, B. F. Oreb, “Design and assessment of symmetrical phase-shifting algorithms,” J. Opt. Soc. Am. A 9, 1740–1748 (1992). [CrossRef]
  12. K. Freischlad, C. L. Koliopoulos, “Fourier description of digital phase-measuring interferometry,” J. Opt. Soc. Am. A 7, 542–551 (1990). [CrossRef]
  13. P. Hariharan, B. F. Oreb, T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm,” Appl. Opt. 26, 2504–2506 (1987). [CrossRef] [PubMed]
  14. P. de Groot, “Phase shifting interferometer and method for surface topography measurement,” U.S. patent5,473,434 (5December1995).
  15. The high-resolution phase-shifting mode in the Zygo Corporation MetroPro PSI software employs the 13-frame algorithm given by Eqs. (22) and (23).
  16. L. L. Deck, “Phase-shifting via wavelength tuning in very large aperture interferometers,” in Optical Manufacturing and Testing III, H. P. Stahl, ed., Proc. SPIE3782, 432–442 (1999). [CrossRef]
  17. P. de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window,” Appl. Opt. 34, 4723–4730 (1995). [CrossRef]
  18. Y. Surrel, “Design of algorithms for phase measurements by the use of phase stepping,” Appl. Opt. 35, 51–60 (1996). [CrossRef] [PubMed]

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