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Applied Optics

Applied Optics


  • Vol. 39, Iss. 16 — Jun. 1, 2000
  • pp: 2727–2732

Unified analytical inversion of reflectometric and ellipsometric data of absorbing media

Georg Jakopic and Walter Papousek  »View Author Affiliations

Applied Optics, Vol. 39, Issue 16, pp. 2727-2732 (2000)

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We present a unified two-step analytical inversion of reflectometric and ellipsometric data of absorbing media. Instead of a direct determination of the optical constants n, κ from reflectometric or ellipsometric measurements, we first calculate the real and the imaginary part η, γ of the normal component of the wave vector in the absorbing medium. New and simple analytical formulas are obtained for η and γ in terms of ρ s , ρ p or tan ψ, δ, respectively, where ρ s , ρ p and tan ψ, δ are the measured reflectometric and ellipsometric parameters of the absorbing medium. The optical constants are then easily determined analytically again from η, γ. We use the new formulas to compare the sensitivity with experimental errors due to the inversion of reflectometric and ellipsometric data.

© 2000 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(160.4760) Materials : Optical properties
(240.0240) Optics at surfaces : Optics at surfaces
(240.6490) Optics at surfaces : Spectroscopy, surface
(260.2130) Physical optics : Ellipsometry and polarimetry

Original Manuscript: October 8, 1999
Revised Manuscript: February 16, 2000
Published: June 1, 2000

Georg Jakopic and Walter Papousek, "Unified analytical inversion of reflectometric and ellipsometric data of absorbing media," Appl. Opt. 39, 2727-2732 (2000)

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