Absorption of thin Al2O3 films was measured at 193 nm with an ArF-laser calorimeter. In addition to the expected high linear absorption coefficient, we found, for the first time to our knowledge, that two-photon absorption and transient color-center formation are nonnegligible loss channels in thin films at 193 nm. The nonlinear absorption coefficient is of the order of several times 10-4 cm/W.
© 2000 Optical Society of America
Original Manuscript: July 23, 1999
Revised Manuscript: March 15, 2000
Published: June 20, 2000
Oliver Apel, Klaus Mann, Alfons Zoeller, Rainer Goetzelmann, and Eric Eva, "Nonlinear absorption of thin Al2O3 films at 193 nm," Appl. Opt. 39, 3165-3169 (2000)