OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 18 — Jun. 20, 2000
  • pp: 3165–3169

Nonlinear absorption of thin Al2O3 films at 193 nm

Oliver Apel, Klaus Mann, Alfons Zoeller, Rainer Goetzelmann, and Eric Eva  »View Author Affiliations


Applied Optics, Vol. 39, Issue 18, pp. 3165-3169 (2000)
http://dx.doi.org/10.1364/AO.39.003165


View Full Text Article

Enhanced HTML    Acrobat PDF (98 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Absorption of thin Al2O3 films was measured at 193 nm with an ArF-laser calorimeter. In addition to the expected high linear absorption coefficient, we found, for the first time to our knowledge, that two-photon absorption and transient color-center formation are nonnegligible loss channels in thin films at 193 nm. The nonlinear absorption coefficient is of the order of several times 10-4 cm/W.

© 2000 Optical Society of America

OCIS Codes
(260.7190) Physical optics : Ultraviolet
(310.1620) Thin films : Interference coatings
(310.6860) Thin films : Thin films, optical properties

History
Original Manuscript: July 23, 1999
Revised Manuscript: March 15, 2000
Published: June 20, 2000

Citation
Oliver Apel, Klaus Mann, Alfons Zoeller, Rainer Goetzelmann, and Eric Eva, "Nonlinear absorption of thin Al2O3 films at 193 nm," Appl. Opt. 39, 3165-3169 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-18-3165

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article

OSA is a member of CrossRef.

CrossCheck Deposited