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Applied Optics

Applied Optics


  • Vol. 39, Iss. 19 — Jul. 1, 2000
  • pp: 3300–3303

In-process monitoring of grinding and polishing of optical surfaces

Robert-Jaap M. van der Bijl, Oliver W. Fähnle, Hedser van Brug, and Joseph J. M. Braat  »View Author Affiliations

Applied Optics, Vol. 39, Issue 19, pp. 3300-3303 (2000)

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A new tool with which to monitor the quality (roughness and subsurface damage) of optical surfaces during grinding and polishing, intensity-detecting total internal reflection microscopy (iTIRM), is presented. A general description of the new measurement method is given, followed by a description of the experimental in situ measurement setup. Experimental results of the method are presented that demonstrate that iTIRM can be used either to control the roughness-reduction process during production or to investigate the process itself. The possibility of implementing the method in an optical workshop is discussed.

© 2000 Optical Society of America

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(220.4610) Optical design and fabrication : Optical fabrication
(220.4840) Optical design and fabrication : Testing
(220.5450) Optical design and fabrication : Polishing

Original Manuscript: October 13, 1999
Revised Manuscript: February 14, 2000
Published: July 1, 2000

Robert-Jaap M. van der Bijl, Oliver W. Fähnle, Hedser van Brug, and Joseph J. M. Braat, "In-process monitoring of grinding and polishing of optical surfaces," Appl. Opt. 39, 3300-3303 (2000)

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  1. P. Temple, “Total internal reflection microscopy: a surface inspection technique,” Appl. Opt. 20, 2656–2664 (1981). [CrossRef] [PubMed]
  2. R. M. van der Bijl, O. W. Fähnle, H. van Brug, “Subsurface damage measurements as a tool for process monitoring,” in Proceedings of ASPE 1999 Annual Meeting (American Society for Precision Engineering, Raleigh, NC, 1999), pp. 606–609.

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