OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 19 — Jul. 1, 2000
  • pp: 3300–3303

In-process monitoring of grinding and polishing of optical surfaces

Robert-Jaap M. van der Bijl, Oliver W. Fähnle, Hedser van Brug, and Joseph J. M. Braat  »View Author Affiliations


Applied Optics, Vol. 39, Issue 19, pp. 3300-3303 (2000)
http://dx.doi.org/10.1364/AO.39.003300


View Full Text Article

Enhanced HTML    Acrobat PDF (210 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A new tool with which to monitor the quality (roughness and subsurface damage) of optical surfaces during grinding and polishing, intensity-detecting total internal reflection microscopy (iTIRM), is presented. A general description of the new measurement method is given, followed by a description of the experimental in situ measurement setup. Experimental results of the method are presented that demonstrate that iTIRM can be used either to control the roughness-reduction process during production or to investigate the process itself. The possibility of implementing the method in an optical workshop is discussed.

© 2000 Optical Society of America

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(220.4610) Optical design and fabrication : Optical fabrication
(220.4840) Optical design and fabrication : Testing
(220.5450) Optical design and fabrication : Polishing

History
Original Manuscript: October 13, 1999
Revised Manuscript: February 14, 2000
Published: July 1, 2000

Citation
Robert-Jaap M. van der Bijl, Oliver W. Fähnle, Hedser van Brug, and Joseph J. M. Braat, "In-process monitoring of grinding and polishing of optical surfaces," Appl. Opt. 39, 3300-3303 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-19-3300

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited