OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 19 — Jul. 1, 2000
  • pp: 3300–3303

In-process monitoring of grinding and polishing of optical surfaces

Robert-Jaap M. van der Bijl, Oliver W. Fähnle, Hedser van Brug, and Joseph J. M. Braat  »View Author Affiliations


Applied Optics, Vol. 39, Issue 19, pp. 3300-3303 (2000)
http://dx.doi.org/10.1364/AO.39.003300


View Full Text Article

Enhanced HTML    Acrobat PDF (210 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A new tool with which to monitor the quality (roughness and subsurface damage) of optical surfaces during grinding and polishing, intensity-detecting total internal reflection microscopy (iTIRM), is presented. A general description of the new measurement method is given, followed by a description of the experimental in situ measurement setup. Experimental results of the method are presented that demonstrate that iTIRM can be used either to control the roughness-reduction process during production or to investigate the process itself. The possibility of implementing the method in an optical workshop is discussed.

© 2000 Optical Society of America

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(220.4610) Optical design and fabrication : Optical fabrication
(220.4840) Optical design and fabrication : Testing
(220.5450) Optical design and fabrication : Polishing

History
Original Manuscript: October 13, 1999
Revised Manuscript: February 14, 2000
Published: July 1, 2000

Citation
Robert-Jaap M. van der Bijl, Oliver W. Fähnle, Hedser van Brug, and Joseph J. M. Braat, "In-process monitoring of grinding and polishing of optical surfaces," Appl. Opt. 39, 3300-3303 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-19-3300


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. P. Temple, “Total internal reflection microscopy: a surface inspection technique,” Appl. Opt. 20, 2656–2664 (1981). [CrossRef] [PubMed]
  2. R. M. van der Bijl, O. W. Fähnle, H. van Brug, “Subsurface damage measurements as a tool for process monitoring,” in Proceedings of ASPE 1999 Annual Meeting (American Society for Precision Engineering, Raleigh, NC, 1999), pp. 606–609.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4 Fig. 5
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited