A new tool with which to monitor the quality (roughness and subsurface damage) of optical surfaces during grinding and polishing, intensity-detecting total internal reflection microscopy (iTIRM), is presented. A general description of the new measurement method is given, followed by a description of the experimental <i>in situ</i> measurement setup. Experimental results of the method are presented that demonstrate that iTIRM can be used either to control the roughness-reduction process during production or to investigate the process itself. The possibility of implementing the method in an optical workshop is discussed.
© 2000 Optical Society of America
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(220.4610) Optical design and fabrication : Optical fabrication
(220.4840) Optical design and fabrication : Testing
(220.5450) Optical design and fabrication : Polishing
Robert-Jaap M. van der Bijl, Oliver W. Fähnle, Hedser van Brug, and Joseph J. M. Braat, "In-Process Monitoring of Grinding and Polishing of Optical Surfaces," Appl. Opt. 39, 3300-3303 (2000)