Abstract
We propose a theoretical method to analyze and characterize the alignment of optical systems by using a singular-value decomposition (SVD) technique. One application of this method is to identify critical parameters for alignment systematically during alignment of two-dimensional device arrays. Another example application is to characterize the sensitivity or the accuracy of the misalignment-detection capability by evaluation of the singular values of optical systems. The information obtained through SVD-based techniques yields critical insights into the analysis of alignment.
© 2000 Optical Society of America
Full Article | PDF ArticleMore Like This
Daniel F.- Brosseau, Frédéric Lacroix, Michael H. Ayliffe, Eric Bernier, Brian Robertson, Frank A. P. Tooley, David V. Plant, and Andrew G. Kirk
Appl. Opt. 39(5) 733-745 (2000)
Arezoo Zakeri, Mohammad Hossein Miran Baygi, and Khosro Madanipour
Appl. Opt. 52(33) 7859-7866 (2013)
Rania A. Eltaieb, Heba A. E. Abouelela, Waddah S. Saif, Amr Ragheb, Ahmed E. A. Farghal, Hossam El-din H. Ahmed, Saleh Alshebeili, Hossam M. H. Shalaby, and Fathi E. Abd El-Samie
Appl. Opt. 59(20) 5989-6004 (2020)