OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 22 — Aug. 1, 2000
  • pp: 3847–3853

Sinusoidal wavelength-scanning interferometric reflectometry

Osami Sasaki, Tomokazu Kuwahara, Ryohta Hara, and Takamasa Suzuki  »View Author Affiliations


Applied Optics, Vol. 39, Issue 22, pp. 3847-3853 (2000)
http://dx.doi.org/10.1364/AO.39.003847


View Full Text Article

Enhanced HTML    Acrobat PDF (150 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We propose interferometric reflectometry in which a sinusoidal wavelength-scanning tunable laser diode is used to detect positions and profiles of multiple reflecting surfaces. An objective signal extracted from an interference signal contains modulation amplitude Z and phase α, which are related to the positions and profiles, respectively, of multiple reflecting surfaces. By using values of the objective signal at special times, we can produce an image intensity that shows where the reflecting surfaces exist. To obtain exact values of Z or values of α, we estimated the objective signal by using a conjugate gradient method. Experimental results show that a resolution of two-optical-path difference (OPD) in the image intensity is ∼60 µm, and the final OPD precisions are 2 and 8 µm for two and three reflecting surfaces, respectively, for a wavelength-scanning width of 7 nm. Profiles of the front and rear surfaces of a silica glass plate with a thickness of 20 µm have been measured with a precision of ∼10 nm.

© 2000 Optical Society of America

OCIS Codes
(110.4500) Imaging systems : Optical coherence tomography
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

History
Original Manuscript: November 8, 1999
Revised Manuscript: April 20, 2000
Published: August 1, 2000

Citation
Osami Sasaki, Tomokazu Kuwahara, Ryohta Hara, and Takamasa Suzuki, "Sinusoidal wavelength-scanning interferometric reflectometry," Appl. Opt. 39, 3847-3853 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-22-3847


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991). [CrossRef] [PubMed]
  2. A. F. Fercher, C. K. Hitzenberger, W. Drexler, G. Kamp, H. Sattmann, “In vivo optical coherence tomography,” Am. J. Ophthalmol. 116, 113–114 (1993). [PubMed]
  3. J. A. Izatt, M. R. Hee, G. M. Owen, E. A. Swanston, J. G. Fujimoto, “Optical coherence microscopy in scattering media,” Opt. Lett. 19, 590–592 (1994). [CrossRef] [PubMed]
  4. M. J. Yadlowsky, J. M. Schmitt, R. F. Bonner, “Multiple scattering in optical coherence microscopy,” Appl. Opt. 34, 5699–5707 (1995). [CrossRef] [PubMed]
  5. A. F. Fercher, K. Mengedoht, W. Werner, “Eye length measurement by interferometry with partially coherent light,” Opt. Lett. 13, 186–188 (1988). [CrossRef] [PubMed]
  6. D. Huang, J. Wang, C. P. Lin, C. A. Puliafito, J. G. Fujimoto, “Micron-resolution ranging of cornea anterior chamber by optical reflectometry,” Lasers Surg. Med. 11, 419–425 (1991). [CrossRef] [PubMed]
  7. G. J. Tearney, M. E. Brezinski, J. F. Southern, B. E. Bouma, M. R. Hee, J. G. Fujimoto, “Determination of the refractive index of highly scattering human tissue by optical coherence tomography,” Opt. Lett. 20, 2258–2260 (1995). [CrossRef] [PubMed]
  8. T. Fukano, I. Yamaguchi, “Simultaneous measurement of thickness and refractive indices of multiple layers by a low-coherence confocal interference microscope,” Opt. Lett. 21, 1942–1944 (1996). [CrossRef] [PubMed]
  9. M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, M. Hashimoto, “Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23, 996–968 (1998). [CrossRef]
  10. Z. He, N. Mukohzaka, K. Hotate, “Selective image extraction by synthesis of the coherence function using two-dimensional optical lock-in amplifier with microchannel spatial light modulator,” IEEE Photon. Technol. Lett. 9, 514–516 (1997). [CrossRef]
  11. Y. Teramura, K. Suzuki, M. Suzuki, F. Kannari, “Low-coherence interferometry with synthesis of coherence function,” Appl. Opt. 38, 5974–5980 (1999). [CrossRef]
  12. A. F. Fercher, C. K. Hitzenberger, G. Kamp, S. Y. El-Zaiat, “Measurement of intraocular distances by backscattering spectral interferometry,” Opt. Commun. 117, 43–48 (1995). [CrossRef]
  13. T. Funaba, N. Tanno, H. Ito, “Multimode-laser reflectometer with a multichannel wavelength detector and its application,” Appl. Opt. 36, 8919–8928 (1997). [CrossRef]
  14. F. Lexer, C. K. Hitzenberger, A. F. Fercher, M. Kulhavy, “Wavelength-tuning interferometry of intraocular distances,” Appl. Opt. 36, 6548–6553 (1997). [CrossRef]
  15. T. Yoshimura, H. Hiratuka, E. Kido, K. Yamada, “Optical coherence tomography in scattering media using a continuous wave tunable laser diode,” in Laser Interferometry IX: Applications, R. J. Pryputniewicz, G. M. Brown, W. P. O. Jupter, eds., Proc. SPIE3479, 207–214 (1998). [CrossRef]
  16. O. Sasaki, T. Kuwahara, R. Hara, T. Suzuki, “Sinusoidal wavelength-scanning interferometeric reflectometry,” in Optical Engineering for Sensing and Nanotechnology, I. Yamaguchi, ed., Proc. SPIE3740, 618–621 (1999). [CrossRef]
  17. O. Sasaki, K. Tsuji, S. Sato, T. Kuwahara, T. Suzuki, “Sinusoidal wavelength-scanning interferometers,” in Laser Interferometry IX: Techniques and Analysis, M. Kujawinska, G. M. Brown, M. Takeda, eds., Proc. SPIE3478, 37–44 (1998). [CrossRef]
  18. O. Sasaki, T. Yoshida, T. Suzuki, “Double sinusoidal phase-modulating laser diode interferometer for distance measurement,” Appl. Opt. 30, 3617–3621 (1991). [CrossRef] [PubMed]
  19. O. Sasaki, H. Okazaki, “Detection of time-varying intensity distribution with CCD image sensors,” Appl. Opt. 24, 2124–2126 (1986). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited