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Applied Optics

Applied Optics


  • Vol. 39, Iss. 22 — Aug. 1, 2000
  • pp: 3894–3898

Algorithm immune to tilt phase-shifting error for phase-shifting interferometers

Mingyi Chen, Hongwei Guo, and Chunlong Wei  »View Author Affiliations

Applied Optics, Vol. 39, Issue 22, pp. 3894-3898 (2000)

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As a phase shifter usually suffers from both translational and tilt-shift errors during shifting, so every pixel in the same interferogram will have a different phase-shift value. Thus nonlinear phase-measurement errors cannot be avoided, but even translational-shift error has been corrected effectively. However, based on the fact that the shifted phases of all the pixels in the same interferogram remain on the phase-shift plane, by defining this plane one can eliminate a significant number of phase errors. A new algorithm that is immune to both translational- and tilt-shift errors in a phase shifter for phase-stepping interferometers is presented. A first-order Taylor series expansion replaces the nonlinear equations for defining the phase-shift plane, and iteration of the algorithm guarantees its accuracy. Results of a computer simulation show that phase-measurement errors caused by both translation- and tilt-shift error can be compensated for completely, even when the tilt-shift error is not more than ±1%.

© 2000 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

Original Manuscript: November 10, 1999
Revised Manuscript: April 20, 2000
Published: August 1, 2000

Mingyi Chen, Hongwei Guo, and Chunlong Wei, "Algorithm immune to tilt phase-shifting error for phase-shifting interferometers," Appl. Opt. 39, 3894-3898 (2000)

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