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Applied Optics

Applied Optics


  • Vol. 39, Iss. 22 — Aug. 1, 2000
  • pp: 3906–3913

Lateral scanning white-light interferometer

Artur Olszak  »View Author Affiliations

Applied Optics, Vol. 39, Issue 22, pp. 3906-3913 (2000)

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White-light vertical scanning interferometry is a well-established technique for retrieving the three-dimensional shapes of small objects, but it can measure only areas as big as the field of view of the instrument. For bigger fields a stitching algorithm must be applied, which often can be a source of errors. A technique in which the object is scanned laterally in front of an instrument with a tilted coherence plane is described. It permits measurements at higher speeds while measurement accuracy is retained and eliminates the need for stitching in one direction. Experimental confirmation is provided.

© 2000 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry

Original Manuscript: February 16, 2000
Revised Manuscript: April 24, 2000
Published: August 1, 2000

Artur Olszak, "Lateral scanning white-light interferometer," Appl. Opt. 39, 3906-3913 (2000)

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  1. H. Takasaki, “Moiré topography,” Appl. Opt. 9, 1467–1472 (1970). [CrossRef] [PubMed]
  2. K. G. Harding, R. Tait, “Moiré techniques applied to automated inspection of machined parts,” in Proceedings of the SME Vision 86 Conference (Society of Manufacturing Engineers, Detroit, Mich., 1986), n.p.
  3. R. P. Tatam, J. C. Davies, C. H. Buckberry, J. D. C. Jones, “Holographic surface contouring using wavelength modulation of laser diodes,” Opt. Laser Technol. 22, 317–321 (1990). [CrossRef]
  4. Z. Ji, M. C. Leu, “Design of optical triangulation devices,” Opt. Laser Technol. 21, 335–338 (1989). [CrossRef]
  5. C. C. Slama, Manual of Photogrammetry, 4th ed. (American Society of Photogrammetry, Falls Church, Va., 1980).
  6. K. A. Haines, B. P. Hildebrand, “Contour generation by wave-front construction,” Phys. Lett. 19, 10–11 (1965). [CrossRef]
  7. P. A. Flourney, R. W. McClure, G. Wyntjes, “White-light interferometric thickness gauge,” Appl. Opt. 11, 1907–1915 (1972). [CrossRef]
  8. T. Dresler, G. Häusler, H. Venzke, “Three dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919–925 (1992). [CrossRef]
  9. G. S. Kino, S. S. C. Chim, “Mirau correlation microscope,” Appl. Opt. 29, 3775–3783 (1990). [CrossRef] [PubMed]
  10. J. C. Wyant, K. Creath, “Recent advances in interferometric optical testing,” Laser Focus/Electro-Optics 21(11) , 118–132 (1985).
  11. K. Matsui, S. Kawata, “Fringe-scanning white-light microscope for surface profile measurement and material identification,” in International Symposium on Optical Fabrication, Testing, and Surface Evaluation, J. Tsujiuchi, ed., Proc. SPIE1720, 124–132 (1992). [CrossRef]
  12. WYKO NT3300 Optical Profiler, brochure (Veeco Process Metrology, Tucson, Ariz., 1999).
  13. D. K. Cohen, P. J. Caber, C. P. Brophy, “Rough surface profiler and method,” U.S. patent5,133,601 (28July1992).
  14. M. Born, E. Wolf, Principles of Optics, 6th ed. (Pergamon, Elmsford, N.Y., 1987).
  15. C. Ai, E. L. Novak, “Centroid approach for estimating modulation peak in broad-bandwidth interferometry,” U.S. patent5,633,715 (27May1997).
  16. P. de Groot, L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995). [CrossRef]
  17. K. G. Larkin, “Efficient nonlinear algorithm for envelope detection in white light interferometry,” J. Opt. Soc. Am. A 13, 832–843 (1996). [CrossRef]
  18. J. C. Wyant, J. Schmit, “Large field of view, high spatial resolution, surface measurements,” in Proceedings of the Seventh International Conference On Metrology and Properties of Engineering Surfaces (Chalmers U. Technol. Press, Göteborg, Sweden, 1997), pp. 294–301.

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