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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 22 — Aug. 1, 2000
  • pp: 3906–3913

Lateral scanning white-light interferometer

Artur Olszak  »View Author Affiliations


Applied Optics, Vol. 39, Issue 22, pp. 3906-3913 (2000)
http://dx.doi.org/10.1364/AO.39.003906


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Abstract

White-light vertical scanning interferometry is a well-established technique for retrieving the three-dimensional shapes of small objects, but it can measure only areas as big as the field of view of the instrument. For bigger fields a stitching algorithm must be applied, which often can be a source of errors. A technique in which the object is scanned laterally in front of an instrument with a tilted coherence plane is described. It permits measurements at higher speeds while measurement accuracy is retained and eliminates the need for stitching in one direction. Experimental confirmation is provided.

© 2000 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry

History
Original Manuscript: February 16, 2000
Revised Manuscript: April 24, 2000
Published: August 1, 2000

Citation
Artur Olszak, "Lateral scanning white-light interferometer," Appl. Opt. 39, 3906-3913 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-22-3906


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