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Applied Optics

Applied Optics


  • Vol. 39, Iss. 23 — Aug. 10, 2000
  • pp: 4107–4111

Longitudinal spatial coherence applied for surface profilometry

Joseph Rosen and Mitsuo Takeda  »View Author Affiliations

Applied Optics, Vol. 39, Issue 23, pp. 4107-4111 (2000)

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A method of optical coherence profilometry, believed to be new, is demonstrated. This method is based on the spatial, rather than the temporal, coherence phenomenon. Therefore the proposed interferometric system is illuminated by a quasi-monochromatic spatial incoherent source instead of a broadband light source. The surface profile is measured by means of shifting the spatial degree of coherence gradually along its longitudinal axis while keeping the optical path difference between the measured surface and a reference plane constant. Experimental proof of the new principle is presented.

© 2000 Optical Society of America

OCIS Codes
(030.1640) Coherence and statistical optics : Coherence
(050.1950) Diffraction and gratings : Diffraction gratings
(100.6950) Image processing : Tomographic image processing
(110.4500) Imaging systems : Optical coherence tomography
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

Original Manuscript: January 21, 2000
Published: August 10, 2000

Joseph Rosen and Mitsuo Takeda, "Longitudinal spatial coherence applied for surface profilometry," Appl. Opt. 39, 4107-4111 (2000)

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  1. B. S. Lee, T. C. Strand, “Profilometry with a coherence scanning microscope,” Appl. Opt. 29, 3784–3788 (1990). [CrossRef] [PubMed]
  2. T. Dresel, G. Hausler, H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919–925 (1992). [CrossRef] [PubMed]
  3. D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991). [CrossRef] [PubMed]
  4. X. J. Wang, T. E. Milner, J. F. de Boer, Y. Zhang, D. H. Pashley, J. S. Nelson, “Characterization of dentin and enamel by use of optical coherence tomography,” Appl. Opt. 38, 2092–2096 (1999). [CrossRef]
  5. P. A. Flournoy, R. W. McClure, G. Wyntjes, “White-light interferometric thickness gauge,” Appl. Opt. 11, 1907–1915 (1972). [CrossRef] [PubMed]
  6. M. Davidson, K. Kaufman, I. Mazor, F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology,” in Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, ed., Proc. SPIE775, 233–247 (1987). [CrossRef]
  7. L. Mandel, E. Wolf, Optical Coherence and Quantum Optics, 1st ed. (Cambridge University, Cambridge, UK, 1995), Chap. 4, p. 149.
  8. J. W. Goodman, Statistical Optics, 1st ed. (Wiley, New York, 1985), Chap. 3, p. 73 (1985); L. Mandel, E. Wolf, Optical Coherence and Quantum Optics, 1st ed. (Cambridge University, Cambridge, UK, 1995), Chap. 2, p. 59.
  9. C. W. McCutchen, “Generalized source and the Van Cittert–Zernike theorem: a study of the spatial coherence required for interferometry,” J. Opt. Soc. Am. 56, 727–733 (1966). [CrossRef]
  10. J. E. Biegen, “Determination of the phase change on reflection from two-beam interference,” Opt. Lett. 19, 1690–1692 (1994). [CrossRef] [PubMed]
  11. J. Rosen, A. Yariv, “Longitudinal partial coherence of optical radiation,” Opt. Commun. 117, 8–12 (1995). [CrossRef]
  12. J. Rosen, A. Yariv, “General theorem of spatial coherence: application to three-dimensional imaging,” J. Opt. Soc. Am. A 13, 2091–2095 (1996). [CrossRef]
  13. K. Hotate, T. Okugawa, “Optical information-processing by synthesis of the coherence function,” J. Lightwave Technol. 12, 1247–1255 (1994). [CrossRef]
  14. Y. Teramura, K. Suzuki, M. Suzuki, F. Kannari, “Low-coherence interferometry with synthesis of coherence function,” Appl. Opt. 38, 5974–5980 (1999). [CrossRef]
  15. J. Rosen, A. Yariv, “Synthesis of an arbitrary axial field profile by computer-generated holograms,” Opt. Lett. 19, 843–845 (1994). [CrossRef] [PubMed]

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