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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 23 — Aug. 10, 2000
  • pp: 4107–4111

Longitudinal spatial coherence applied for surface profilometry

Joseph Rosen and Mitsuo Takeda  »View Author Affiliations


Applied Optics, Vol. 39, Issue 23, pp. 4107-4111 (2000)
http://dx.doi.org/10.1364/AO.39.004107


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Abstract

A method of optical coherence profilometry, believed to be new, is demonstrated. This method is based on the spatial, rather than the temporal, coherence phenomenon. Therefore the proposed interferometric system is illuminated by a quasi-monochromatic spatial incoherent source instead of a broadband light source. The surface profile is measured by means of shifting the spatial degree of coherence gradually along its longitudinal axis while keeping the optical path difference between the measured surface and a reference plane constant. Experimental proof of the new principle is presented.

© 2000 Optical Society of America

OCIS Codes
(030.1640) Coherence and statistical optics : Coherence
(050.1950) Diffraction and gratings : Diffraction gratings
(100.6950) Image processing : Tomographic image processing
(110.4500) Imaging systems : Optical coherence tomography
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

History
Original Manuscript: January 21, 2000
Published: August 10, 2000

Citation
Joseph Rosen and Mitsuo Takeda, "Longitudinal spatial coherence applied for surface profilometry," Appl. Opt. 39, 4107-4111 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-23-4107

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