The angular distributions of light scattered by gold-coated and aluminum-coated gratings with amplitudes of ∼90 nm and periods of 6.67 µm were measured and calculated for light incident from a He–Ne laser at an angle of 6°. Experimental results are compared with predictions of Beckmann’s scalar theory and Rayleigh’s vector theory. The measured scattering pattern has a background of scattered light due mainly to residual surface roughness. Also the power in the higher-order peaks is larger by several orders of magnitude than the computed one, which can be attributed mainly to the low-order contributions of the harmonics in the profile.
© 2000 Optical Society of America
Original Manuscript: January 14, 2000
Revised Manuscript: May 2, 2000
Published: September 1, 2000
Egon Marx, Thomas A. Germer, Theodore V. Vorburger, and Byong C. Park, "Angular distribution of light scattered from a sinusoidal grating," Appl. Opt. 39, 4473-4485 (2000)