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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 25 — Sep. 1, 2000
  • pp: 4540–4546

Experimental comparison of a Shack–Hartmann sensor and a phase-shifting interferometer for large-optics metrology applications

Jeffrey A. Koch, Robert W. Presta, Richard A. Sacks, Richard A. Zacharias, Erlan S. Bliss, Michael J. Dailey, Mark Feldman, Andrew A. Grey, Fred R. Holdener, Joseph T. Salmon, Lynn G. Seppala, John S. Toeppen, Lewis Van Atta, Bruno M. Van Wonterghem, Wayne T. Whistler, Scott E. Winters, and Bruce W. Woods  »View Author Affiliations


Applied Optics, Vol. 39, Issue 25, pp. 4540-4546 (2000)
http://dx.doi.org/10.1364/AO.39.004540


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Abstract

We performed a direct side-by-side comparison of a Shack–Hartmann wave-front sensor and a phase-shifting interferometer for the purpose of characterizing large optics. An expansion telescope of our own design allowed us to measure the surface figure of a 400-mm-square mirror with both instruments simultaneously. The Shack–Hartmann sensor produced data that closely matched the interferometer data over spatial scales appropriate for the lenslet spacing, and much of the <20-nm rms systematic difference between the two measurements was due to diffraction artifacts that were present in the interferometer data but not in the Shack–Hartmann sensor data. The results suggest that Shack–Hartmann sensors could replace phase-shifting interferometers for many applications, with particular advantages for large-optic metrology.

© 2000 Optical Society of America

OCIS Codes
(010.7060) Atmospheric and oceanic optics : Turbulence
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation

History
Original Manuscript: January 10, 2000
Revised Manuscript: May 19, 2000
Published: September 1, 2000

Citation
Jeffrey A. Koch, Robert W. Presta, Richard A. Sacks, Richard A. Zacharias, Erlan S. Bliss, Michael J. Dailey, Mark Feldman, Andrew A. Grey, Fred R. Holdener, Joseph T. Salmon, Lynn G. Seppala, John S. Toeppen, Lewis Van Atta, Bruno M. Van Wonterghem, Wayne T. Whistler, Scott E. Winters, and Bruce W. Woods, "Experimental comparison of a Shack–Hartmann sensor and a phase-shifting interferometer for large-optics metrology applications," Appl. Opt. 39, 4540-4546 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-25-4540


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References

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