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Applied Optics

Applied Optics


  • Vol. 39, Iss. 25 — Sep. 1, 2000
  • pp: 4547–4556

Particle-size analysis by laser diffraction with a complementary metal-oxide semiconductor pixel array

Zhenhua Ma, Henk G. Merkus, and Brian Scarlett  »View Author Affiliations

Applied Optics, Vol. 39, Issue 25, pp. 4547-4556 (2000)

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Existing laser-diffraction instruments that use photodiode detectors have a limited resolution for particle sizing. We attempt the implementation of a complementary metal-oxide semiconductor pixel sensor for particle-size measurement by laser diffraction. The sensor has unique features: high resolution, no blooming, and a wide dynamic range (i.e., direct measurement of the scattering pattern). The calibration of the sensor is based on each pixel. The signal-processing and the inversion schemes for obtaining the particle-size distribution are described. The results indicate an improved size resolution and an increased flexibility of application.

© 2000 Optical Society of America

OCIS Codes
(040.1240) Detectors : Arrays
(050.1960) Diffraction and gratings : Diffraction theory
(100.2000) Image processing : Digital image processing
(120.1880) Instrumentation, measurement, and metrology : Detection
(140.3460) Lasers and laser optics : Lasers

Original Manuscript: February 22, 2000
Revised Manuscript: June 8, 2000
Published: September 1, 2000

Zhenhua Ma, Henk G. Merkus, and Brian Scarlett, "Particle-size analysis by laser diffraction with a complementary metal-oxide semiconductor pixel array," Appl. Opt. 39, 4547-4556 (2000)

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