OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 25 — Sep. 1, 2000
  • pp: 4658–4668

Large-angle in-plane light scattering from rough surfaces

Tansel Karabacak, Yiping Zhao, Matthew Stowe, Bill Quayle, Gwo-Ching Wang, and Ton-Ming Lu  »View Author Affiliations


Applied Optics, Vol. 39, Issue 25, pp. 4658-4668 (2000)
http://dx.doi.org/10.1364/AO.39.004658


View Full Text Article

Enhanced HTML    Acrobat PDF (1099 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

An in-plane light scattering setup that is capable of measuring large azimuthal scattering angles is presented. This type of measurement makes it easier to probe large k at a fixed k value (k and k are momentum transfer vectors parallel and perpendicular to the surface, respectively). Therefore the system allows us to explore small lateral scale and large vertical roughness (∼λ, the wavelength of the probe beam) of a rough surface. In-plane intensity measurements from a rough backside Si wafer and a Cu thin-film surface are reported. The structure factor that is related to surface roughness parameters is obtained from the measured in-plane intensity profiles. Both scalar (Beckmann–Kirchhoff) and vector (Rayleigh–Rice) theories have been applied to interpret the experimental data. The roughness parameters obtained from the scattering measurements are compared with those measured by atomic-force microscopy.

© 2000 Optical Society of America

OCIS Codes
(050.1960) Diffraction and gratings : Diffraction theory
(240.5770) Optics at surfaces : Roughness
(290.5820) Scattering : Scattering measurements
(290.5880) Scattering : Scattering, rough surfaces

History
Original Manuscript: November 2, 1999
Revised Manuscript: April 4, 2000
Published: September 1, 2000

Citation
Tansel Karabacak, Yiping Zhao, Matthew Stowe, Bill Quayle, Gwo-Ching Wang, and Ton-Ming Lu, "Large-angle in-plane light scattering from rough surfaces," Appl. Opt. 39, 4658-4668 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-25-4658

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited