Calibration of a 300-mm-Aperture Phase-Shifting Fizeau Interferometer
Applied Optics, Vol. 39, Issue 28, pp. 5161-5171 (2000)
http://dx.doi.org/10.1364/AO.39.005161
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Abstract
A 300-mm-aperture digital phase-shifting Fizeau interferometer has been developed in-house for precision metrology of optical components fabricated by the optical workshop at Telecommunications and Industrial Physics, Commonwealth Scientific and Industrial Research Organization. We describe the procedures used in the calibration of the instrument. A reference data file representing the deviations from flatness of the reference surface is generated, measurement uncertainty estimated, and aberrations in the instrument assessed. Measurements on 250-mm-diameter uncoated optical surfaces have consistently shown short-term repeatability of 0.3-nm rms from measurement to measurement and allowed for absolute characterization of these surfaces to within a few nanometers.
© 2000 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
Citation
Bozenko (Bob) F. Oreb, David I. Farrant, Christopher J. Walsh, Greg Forbes, and Philip S. Fairman, "Calibration of a 300-mm-Aperture Phase-Shifting Fizeau Interferometer," Appl. Opt. 39, 5161-5171 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-28-5161
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