A noncontact and compact optical displacement sensor is proposed and demonstrated. The principle of this system is based on the differential optical-fiber displacement sensor [Appl. Opt. <b>38,</b> 1103 (1999)]. The waveguide of the sensor consists of three thin plate glasses. This approach can miniaturize and lighten the system. The performance of the sensor is geometrically analyzed. The linearity and working range of the sensor are significantly improved compared with those of the optical fiber.
© 2000 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.0280) Instrumentation, measurement, and metrology : Remote sensing and sensors
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(120.5700) Instrumentation, measurement, and metrology : Reflection
Fukuo Suganuma, Atsushi Shimamoto, and Kohichi Tanaka, "Development of a Differential, Optical, Reflective Displacement Sensor by Use of a Multilayered Waveguide," Appl. Opt. 39, 5745-5749 (2000)