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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 4 — Feb. 1, 2000
  • pp: 489–493

Diffraction gratings of photosensitive ZrO2 gel films fabricated with the two-ultraviolet-beam interference method

Kenji Kintaka, Junji Nishii, and Noboru Tohge  »View Author Affiliations


Applied Optics, Vol. 39, Issue 4, pp. 489-493 (2000)
http://dx.doi.org/10.1364/AO.39.000489


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Abstract

Photosensitive ZrO<sub>2</sub> gel films were patterned with a two-beam interference method by use of a 325-nm-wavelength He–Cd laser for the first time to our knowledge. The ZrO<sub>2</sub> gel films were prepared from Zr(O-<i>n</i>-C<sub>4</sub>H<sub>9</sub>)<sub>4</sub> chemically modified with benzoylacetone. We fabricated uniform gratings with a 0.5-μm period on Si or SiO<sub>2</sub> substrates by etching the gel films in ethyl alcohol after UV irradiation. A maximum diffraction efficiency of 28% was attained with the grating fabricated on Si substrate under a Littrow mounting condition by use of a 633-nm-wavelength He–Ne laser. Blazed gratings could also be fabricated.

© 2000 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.2770) Diffraction and gratings : Gratings
(160.6060) Materials : Solgel
(220.4610) Optical design and fabrication : Optical fabrication
(230.4000) Optical devices : Microstructure fabrication

Citation
Kenji Kintaka, Junji Nishii, and Noboru Tohge, "Diffraction gratings of photosensitive ZrO2 gel films fabricated with the two-ultraviolet-beam interference method," Appl. Opt. 39, 489-493 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-4-489


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References

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