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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 4 — Feb. 1, 2000
  • pp: 526–538

Precise interferometric length and phase-change measurement of gauge blocks based on reproducible wringing

Alexandre Titov, Igor Malinovsky, Hakima Belaïdi, Ricardo S. França, and Carlos A. Massone  »View Author Affiliations


Applied Optics, Vol. 39, Issue 4, pp. 526-538 (2000)
http://dx.doi.org/10.1364/AO.39.000526


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Abstract

A modern fringe-pattern-analyzing interferometer with a resolution of 1 × 10-9 and without exclusion of systematic uncertainties owing to optic effects of less than 1 nm was used to test a new method of interferometric length measurement based on a combination of the reproducible wringing and slave-block techniques. Measurements without excessive wringing film error are demonstrated for blocks with nominal lengths of 2–6 mm and with high surface flatness. The uncertainty achieved for these blocks is less than 1 nm. Deformations of steel gauge blocks and reference platens, caused by wringing forces, are investigated, and the necessary conditions for reproducible wringing are outlined. A subnanometer uncertainty level in phase-change-correction measurements has been achieved for gauge blocks as long as 100 mm. Limitations on the accuracy standard method of interferometric length measurements and shortcomings of the present definition of the length of the material artifact are emphasized.

© 2000 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

History
Original Manuscript: May 17, 1999
Revised Manuscript: October 25, 1999
Published: February 1, 2000

Citation
Alexandre Titov, Igor Malinovsky, Hakima Belaïdi, Ricardo S. França, and Carlos A. Massone, "Precise interferometric length and phase-change measurement of gauge blocks based on reproducible wringing," Appl. Opt. 39, 526-538 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-4-526


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References

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