OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 7 — Mar. 1, 2000
  • pp: 1112–1117

Application of a Mid-Infrared Fiber Bundle in Remote Measurement of Gas Concentrations in a Chemical Vapor Deposition Chamber

Ping Lu, Xiaoyi Bao, Tom Whidden, and Sun Young Lee  »View Author Affiliations


Applied Optics, Vol. 39, Issue 7, pp. 1112-1117 (2000)
http://dx.doi.org/10.1364/AO.39.001112


View Full Text Article

Acrobat PDF (140 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A fiber bundle has been designed for measurement of gas concentrations in a chemical vapor deposition (CVD) chamber. The bundle is broadband, covering the spectrum range from 500 to 6000 cm<sup>−1</sup>. Using this bundle, we have designed Fourier Transform infrared (FTIR) sampling configurations with reduced beam divergence (from 0.4 to 0.1 rad) and focal spot diameters (from 12 to 4 mm). The FTIR spectrum of tetraethoxysilane vapors in a CVD chamber was determined with the bundle and modified SAM connectors. An ellipsoid reflector was designed that yielded improved signal-to-noise ratios (SNR’s) in the fiber-based spectra by a factor of 2. The incorporation of this reflector in spectrometers by use of the fiber bundle has the potential to reduce the sampling times for spectra while retaining acceptable SNR’s.

© 2000 Optical Society of America

OCIS Codes
(060.2280) Fiber optics and optical communications : Fiber design and fabrication
(060.2390) Fiber optics and optical communications : Fiber optics, infrared
(230.4040) Optical devices : Mirrors
(260.3060) Physical optics : Infrared
(300.6300) Spectroscopy : Spectroscopy, Fourier transforms

Citation
Ping Lu, Xiaoyi Bao, Tom Whidden, and Sun Young Lee, "Application of a Mid-Infrared Fiber Bundle in Remote Measurement of Gas Concentrations in a Chemical Vapor Deposition Chamber," Appl. Opt. 39, 1112-1117 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-7-1112


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. Semiconductor Industry Association, The 1997 National Technology Roadmap for Semiconductors (SEMATECH, Austin, Tex., 1997) (URL: http://notes.sematech.org/ntrs/pubintrs.nsf).
  2. J. D. Jones and P. D. Jero, “In situ control of chemical vapor deposition for fiber coating,” Eng. Appl. Artif. Intell. 11(Issue 5), 619–626 (1998).
  3. K. I. Hanaoka, H. Ohnishi, and K. Tachibana, “In situ measurements of gas-phase reactions on metalorganic chemical vapor deposition of copper films by Fourier transform infrared spectroscopy,” Jpn. J. Appl. Phys. 32, 4774–4778 (1993).
  4. K. I. Hanaoka, K. Tachibana, and H. Ohnishi, “In situ measurements of gas-phase reactions during the chemical vapor deposition of copper using Fourier-transform infrared spectroscopy,” Thin Solid Films 262, 209–217 (1995).
  5. J. A. O’Neill, M. L. Passow, and T. J. Cotler, “Infrared absorption spectroscopy of monitoring condensable gases in chemical vapor deposition applications,” J. Vac. Sci. Technol. A12, 839–845 (1994).
  6. S. Salim, K. F. Jensen, and R. D. Driver, “Monitoring of gas-phase species in metalorganic vapor epitaxy by fiber-optics-based Fourier transform infrared spectroscopy,” J. Cryst. Growth 145, 28–35 (1994).
  7. T. Whidden, X. Bao, J. Taylor, M. Couturier, P. Lu, Z. Xiaozhong, and S. Romet, “In situ studies of TEOS/ozone CVD: experimental considerations for probing reaction boundary layers in commercial CVD equipment,” in Proceedings of the 194th Meeting of the Electrochemical Society, PV 98–23 (The Electrochemical Society, Pennington, N.J., 1998), pp. 153–160.
  8. M. Saito and K. Kikuchi, “Infrared optical fiber sensors,” Opt. Rev. 4, 524–538 (1997).
  9. P. Hansch, J. R. Norby, S. H. Evans, and L. D. Vanwoerkom, “An ellipsoidal mirror time-of-flight photoelectron energy analyzer,” Rev. Sci. Instrum. 66, 5512–5515 (1995).
  10. X. Bao, P. Lu, and T. Whidden, “A novel way of improving the collection efficiency and image quality of glowbar to mid-IR fibers,” in Infrared Glass Optical Fibers and Their Applications, M. Saad, ed., Proc. SPIE 3416, 213–219 (1998).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited